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300 mm Wafer Compatible, Parallel Seal Type Slit Valve XGTP Series (Part Numbers)

300 mm Wafer Compatible, Parallel Seal Type Slit Valve XGTP Series

Parallel seal type slit valve XGTP series.
[Features]
・ Long lifespan: 3 million uses (At normal temperature)
・ Dust generation amount: Reduced to 1/5 or less
・ 22% reduction in air consumption
・ Easy bellows replacement
・ The gate can be replaced from the top
・ Mechanical end lock mechanism adopted

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images are representative only. Please refer to the manufacturer's catalog for shape details.

PDF

Part Number

Configured Part Number is shown.

Part Number
XGT300-2-5S
XGT300-9-7S
XGT300-9-9S
XGT300-9-10S
XGT300-9-11S
XGTP300-2-1S
XGTP300-20AS
XGTP311-50336-1
XGTP311-50336-1A
XGTP311-50336-1AN
XGTP311-50336-1F
XGTP311-50336-1N
XGTP311-50336-2
XGTP311-50336-2A
XGTP311-50336-2AN
XGTP312-50336-1
XGTP312-50336-1A
XGTP312-50336-1AN
XGTP312-50336-1C
XGTP312-50336-1CN
XGTP312-50336-1F
XGTP312-50336-1N
XGTP312-50336-2
XGTP312-50336-2A
XGTP312-50336-2AN
XGTP312-50336-2C
XGTP313-50336-1
XGTP313-50336-1A
XGTP313-50336-1AN
XGTP313-50336-1C
XGTP313-50336-2A
XGTP313-50336-2AN
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipSize Types of Related components Connector type Specifications Valve Model Material Auto switch End Lock

-

1 Piece(s) 15 Day(s) -Fixing bolt---SUS316--

2,326,075 IDR

1 Piece(s) 31 Day(s) -O-ring (Bonnet assembly)---FKM--

-

1 Piece(s) 15 Day(s) -O-ring (Gate part)---FKM--

2,326,075 IDR

1 Piece(s) 31 Day(s) -O-ring (Body opening surface)---FKM--

26,555,160 IDR

1 Piece(s) 20 Day(s) -O-ring (Gate part)---Kalrez 4079--

-

1 Piece(s) 15 Day(s) -Gate---A6063--

-

1 Piece(s) 15 Day(s) -Bellows---AM350--

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Insert type (Without body)FKM (Gate part seal)NoneOPEN/CLOSE end lock

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Insert type (Without body)FKM (Gate part seal)D-A93OPEN/CLOSE end lock

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Insert type (Without body)FKM (Gate part seal)D-A93None

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveD-sub connectorLong lifespan of 3 million uses (At normal temperature)Insert type (Without body)FKM (Gate part seal)D-A93OPEN/CLOSE end lock

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Insert type (Without body)FKM (Gate part seal)NoneNone

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Insert type (Without body)Kalrez 4079 (Gate part seal)NoneOPEN/CLOSE end lock

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Insert type (Without body)Kalrez 4079 (Gate part seal)D-A93OPEN/CLOSE end lock

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Insert type (Without body)Kalrez 4079 (Gate part seal)D-A93None

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)FKM (Gate part seal)NoneOPEN/CLOSE end lock

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)FKM (Gate part seal)D-A93OPEN/CLOSE end lock

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)FKM (Gate part seal)D-A93None

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveMulti connector (AMP)Long lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)FKM (Gate part seal)D-A93OPEN/CLOSE end lock

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveMulti connector (AMP)Long lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)FKM (Gate part seal)D-A93None

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveD-sub connectorLong lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)FKM (Gate part seal)D-A93OPEN/CLOSE end lock

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)FKM (Gate part seal)NoneNone

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)Kalrez 4079 (Gate part seal)NoneOPEN/CLOSE end lock

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)Kalrez 4079 (Gate part seal)D-A93OPEN/CLOSE end lock

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)Kalrez 4079 (Gate part seal)D-A93None

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveMulti connector (AMP)Long lifespan of 3 million uses (At normal temperature)Cassette type (Standard body)Kalrez 4079 (Gate part seal)D-A93OPEN/CLOSE end lock

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Half-MESK body)FKM (Gate part seal)NoneOPEN/CLOSE end lock

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Half-MESK body)FKM (Gate part seal)D-A93OPEN/CLOSE end lock

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Half-MESK body)FKM (Gate part seal)D-A93None

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveMulti connector (AMP)Long lifespan of 3 million uses (At normal temperature)Cassette type (Half-MESK body)FKM (Gate part seal)D-A93OPEN/CLOSE end lock

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Half-MESK body)Kalrez 4079 (Gate part seal)D-A93OPEN/CLOSE end lock

-

1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Cassette type (Half-MESK body)Kalrez 4079 (Gate part seal)D-A93None

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