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300 mm Wafer Compatible, Parallel Seal Type Slit Valve XGTP Series (Part Numbers)

300 mm Wafer Compatible, Parallel Seal Type Slit Valve XGTP Series

Parallel seal type slit valve XGTP series.
[Features]
・ Long lifespan: 3 million uses (At normal temperature)
・ Dust generation amount: Reduced to 1/5 or less
・ 22% reduction in air consumption
・ Easy bellows replacement
・ The gate can be replaced from the top
・ Mechanical end lock mechanism adopted

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images are representative only. Please refer to the manufacturer's catalog for shape details.

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Part Number

Configured Part Number is shown.

XGT300-9-9S

Part Number
XGT300-9-9S
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipSize Types of Related components Connector type Specifications Valve Model Material Auto switch End Lock

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1 Piece(s) 15 Day(s) -O-ring (Gate part)---FKM--

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Please check the type/dimensions/specifications of the part XGT300-9-9S in the 300 mm Wafer Compatible, Parallel Seal Type Slit Valve XGTP Series series.

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Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipSize Types of Related components Connector type Specifications Valve Model Material Auto switch End Lock

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1 Piece(s) 31 Day(s) -O-ring (Body opening surface)---FKM--

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1 Piece(s) 15 Day(s) -Gate---A6063--

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1 Piece(s) 15 Day(s) -Bellows---AM350--

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1 Piece(s) 15 Day(s) Height 50 × width 366 mm (Open window)Slit valveNoneLong lifespan of 3 million uses (At normal temperature)Insert type (Without body)FKM (Gate part seal)NoneOPEN/CLOSE end lock

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