Vacuum Valves（Number of Ports：2-Port Valve）

• 

  Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)

  SMC

  A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
  [Features]
  · Uses no sliding metal parts, minimizing particulate matter.
  · The pressure balance mechanism allows an unrestricted exhaust direction.
  · A control power supply circuit for solenoid valve drive is now standard.
  · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
  · Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
  · Low sputtering yield minimizes heavy metal contamination of wafers.

  CAD ：

  2D / 3D

  Days to Ship:	15 Day(s) or more

• 

  Vacuum Assist Valve ZP2V Series

  SMC

  A vacuum valve which inhibits drops in vacuum pressure, even when no workpiece is present.
  [Features]
  · Keeps hold of workpieces when multiple vacuum pads are used by a single vacuum generator.
  · Protects against drops in vacuum pressure, even when some pads are not suctioning.
  · Single-action fitting models now also available.
  · No need for switching the operation when changing out workpieces.
  · Allows the simplification of control circuits when workpieces have different shapes.
  · Fixed orifice size: 0.3 mm, 0.5 mm, 0.7 mm, 1 mm.

  CAD ：

  2D / 3D

  Days to Ship:	20 Day(s) or more

• 

  Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

  SMC

  [Features]
  · Aluminum body
  · Uniform baking temperature
  · Lightweight and compact
  · Low outgassing
  · Little heavy metal contamination
  · Resistant to fluorine corrosion
  · Replaceable bellows (bellows-seal type)

  CAD ：

  2D / 3D

  Days to Ship:	15 Day(s) or more

• 

  Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series

  SMC

  Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
  [Features]
  · Bellows type is particulate-free and cleaned.
  · Pressure balanced structure.
  · Body material: SCS13 (SUS304 equivalent).
  · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

  CAD ：

  2D / 3D

  Days to Ship:	15 Day(s) or more

• 

  Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)

  SMC

  A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance.
  [Features]
  ・ Flame-retardant (UL94 V-0 compliant)
  ・ Two types of fittings (face seal fittings / compression fittings) and female threads (Rc, NPT) are available
  ・ By moving the spring from the sliding part of the armature to the body part, dust generation due to contact with the spring has been reduced
  ・ Securely seals with a large spring force
  ・ Power consumption *: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (Size 3) (* For DC specifications / B type. )
  ・ Operating temperature range: 5 to 60℃

  CAD ：

  2D / 3D

  Days to Ship:	15 Day(s) or more

• 

  Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series

  SMC

  A vacuum valve with a pressure balanced structure.
  [Features]
  · Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
  · Precision-cast single-piece structure which helps prevent gas accumulation.
  · Interchangeable with XL Series aluminum high-vacuum angle valves.
  · Bellows type is particulate-free and cleaned.

  CAD ：

  2D / 3D

  Days to Ship:	15 Day(s) or more

• 

  Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

  SMC

  [Features]
  · Aluminum body
  · Uniform baking temperature
  · Lightweight and compact
  · Low outgassing
  · Little heavy metal contamination
  · Resistant to fluorine corrosion
  · Replaceable bellows (bellows-seal type)

  CAD ：

  2D / 3D

  Days to Ship:	15 Day(s) or more

• 

  Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

  SMC

  A vacuum valve for preventing pumps from running when overloaded.
  [Features]
  · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
  · Allows for compact system designs and reduced piping.
  · Prevents dust turbulence inside the chamber when exhausting.
  · Adjustable flow rate for initial exhaust valve.
  · Body material: SCS13 (SUS304 equivalent).
  · Precision-cast single-piece structure which helps prevent gas accumulation.
  · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

  CAD ：

  2D / 3D

  Days to Ship:	15 Day(s) or more

• 

  Electromagnetic Valve for High Vacuum HVB6· 712 Series

  CKD

  This is an electromagnetic valve for high vacuum and it provides high vacuum maintaining force and excellent durability. Can be used for back pressure.

  Days to Ship:	16 Day(s) or more

• 

  Electromagnetic Valve for High Vacuum HVB Series

  CKD

  This is an electromagnetic valve for high vacuum and it provides high vacuum maintaining force and excellent durability.

  CAD ：

  2D

  Days to Ship:	16 Day(s) or more

• 

  Delay Electromagnetic Valve BN-7KV Series

  NIHON SEIKI

  Supports high vacuum. Exceptional energy savings.
  
  [Features]
  · Exceptional energy saving, with 3 W at normal operation (1/12 of former product by this manufacturer). Attains a 1/12 reduction in power consumption during normal operation in comparison to former products by using pulse voltage for the energizer signal to the magnet.
  · Valve leakage for vacuum is 3 x 10-9Pa m3/s (He) or less. Uses SUS304 for the body and FKM for the valve seat. Maintains a high degree of vacuum.
  · Compact and high capacity, with Cv value 0.45: . Assures large valve capacity even though it has been made greatly smaller.
  · No heat emission from coil: The coil is not energized during normal operation, so there is no heat emission at all from the coil, and no damage to the coil and no degradation of surrounding parts by heat.
  · Environmentally friendly: Has a control board and is lead free. Other substances that can degrade the environment have been greatly reduced.

  Standard Price:	8,158,462 IDR
  Days to Ship:	12 Day(s)

• 

  High-Vacuum Angle Valve (Multi-Action / Single-Action)

  IRIE KOKEN

  [Features]
  · The vacuum side valve material is completely made up of stainless steel (SUS).
  · The entire unit is made small and lightweight by the compact design.
  · There is no leakage even when normal pressure and reverse pressure use a pressure difference of 0.15MPa.
  · Installation can be in any position. (Unless otherwise specified, it is recommended that installation be with the valve seat facing the direction with largest pressure fluctuation.)
  · The functional design results in large conductance.
  · It has a single-side rotating flange, so installation is easy (ConFlat flange).

  Standard Price:	6,393,310 IDR-
  Days to Ship:	8 Day(s) or more

• 

  Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series

  SMC

  [Features]
  · Aluminum body
  · Uniform baking temperature
  · Lightweight and compact
  · Low outgassing
  · Little heavy metal contamination
  · Resistant to fluorine corrosion
  · Replaceable bellows (bellows-seal type)

  CAD ：

  2D / 3D

  Days to Ship:	15 Day(s) or more

• 

  Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve

  SMC

  [Features]
  · Aluminum body
  · Uniform baking temperature
  · Lightweight and compact
  · Low outgassing
  · Little heavy metal contamination
  · Resistant to fluorine corrosion
  · Replaceable bellows (bellows-seal type)

  CAD ：

  2D / 3D

  Days to Ship:	15 Day(s) or more

• 

  Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

  SMC

  A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
  [Features]
  · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
  ・ Achieves system compactness and piping savings
  ・ Prevents dust from rolling up in the chamber when exhausting
  ・ Adjustable initial exhaust valve flow rate
  ・ Air operated type / with solenoid valve
  ・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened
  ・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer
  ・ Strong against fluorine
  · Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion
  · Lightweight and compact

  CAD ：

  2D / 3D

  Days to Ship:	15 Day(s) or more

• 

  Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve

  SMC

  A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
  [Features]
  · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
  · Allows for compact system designs and reduced piping.
  · Prevents dust turbulence inside the chamber when exhausting.
  · Adjustable flow rate for initial exhaust valve.
  · Air-operated type with solenoid valve.
  · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
  · Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
  · Low sputtering yield minimizes heavy metal contamination of wafers.

  CAD ：

  2D / 3D

  Days to Ship:	15 Day(s) or more

• 

  Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series

  SMC

  A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
  [Features]
  · Bellows type is particulate-free and cleaned.
  · Low actuation torque (0.5 N·m or less).
  · Spring provides a standard sealing load.
  · Handle height remains the same regardless of whether valve is open or closed.
  · Equipped as standard with an indicator for confirming if the valve is open or closed.
  · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
  · Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
  · Low sputtering yield minimizes heavy metal contamination of wafers.

  CAD ：

  2D / 3D

  Days to Ship:	15 Day(s) or more

• 

  Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)

  SMC

  A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
  [Features]
  · Bellows type is particulate-free and cleaned.
  · Low actuation torque (0.5 N·m or less).
  · Spring provides a standard sealing load.
  · Handle height remains the same regardless of whether valve is open or closed.
  · Equipped as standard with an indicator for confirming if the valve is open or closed.
  · Body material: SCS13 (SUS304 equivalent).
  · Precision-cast single-piece structure which helps prevent gas accumulation.
  · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

  CAD ：

  2D / 3D

  Days to Ship:	15 Day(s) or more

• 

  Delay Vacuum Solenoid Valve

  NIHON SEIKI

  Standard Price:	7,215,385 IDR
  Days to Ship:	12 Day(s)

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