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Search by Brand Pencarian dengan Merek
This translation is a Google translation Terjemahan ini adalah terjemahan Google
- Penghentian penjualan kategori produk pneumatik Seri Ekonomi (E-series). Info Detail
Notice of End of Sales for Economy Series Pneumatic Equipment Category. More information.
Vacuum Valves（Number of Ports：2-Port Valve）
Blocking valves: These valves are used to isolate vacuum sections and block pressure differentials and come in various types, such as gate valves, L type valves, straight valves, and butterfly valves, to suit the possible pressure zones and applications within a vacuum system.
Conductance valves: needle valves and butterfly valves (used to control the flow rate of gas entering the empty chamber.)
The term "valve" itself is a generic term for things that control the flow of liquid or gas in pipe networks, controlling the fluid direction, pressure, and flow rate
From L type valves through to gate valve and from atmospheric pressure through to vacuum pressures, valves for all types of areas, conditions, and applications are available, including those for ultra-high vacuum levels.
| Days to Ship |
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Electromagnetic Valve for High Vacuum HVB Series
CKD
This is an electromagnetic valve for high vacuum and it provides high vacuum maintaining force and excellent durability.
- CAD ：
- 2D
Days to Ship: 16 Day(s) or more -
SMC
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
・ Achieves system compactness and piping savings
・ Prevents dust from rolling up in the chamber when exhausting
・ Adjustable initial exhaust valve flow rate
・ Air operated type / with solenoid valve
・ Since there is little outgas, the pump capacity can be small and the exhaust time can be shortened
・ It does not contain heavy metals such as Ni (nickel) and Cr (chromium), and the sputtering rate is low, so there is little heavy metal contamination on the wafer
・ Strong against fluorine
· Uniform baking temperature. Good thermal conductivity, uniform temperature throughout the body, drastically reducing product adhesion
· Lightweight and compactDays to Ship: 15 Day(s) or more -
Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance)
SMC
A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Days to Ship: 15 Day(s) or more -
SMC
A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.Days to Ship: 15 Day(s) or more -
Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Days to Ship: 15 Day(s) or more -
Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Days to Ship: 15 Day(s) or more -
Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Days to Ship: 15 Day(s) or more -
Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve
SMC
A high vacuum angle (L-shaped) valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Air-operated type with solenoid valve.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Days to Ship: 15 Day(s) or more -
Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series
SMC
A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.Days to Ship: 15 Day(s) or more -
Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal)
SMC
A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.Days to Ship: 15 Day(s) or more -
Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3)
SMC
A normally closed type high vacuum solenoid valve with reduced particulate matter and improved sealing performance.
[Features]
・ Flame-retardant (UL94 V-0 compliant)
・ Two types of fittings (face seal fittings / compression fittings) and female threads (Rc, NPT) are available
・ By moving the spring from the sliding part of the armature to the body part, dust generation due to contact with the spring has been reduced
・ Securely seals with a large spring force
・ Power consumption *: 4.5 W (size 1) / 7 W (size 2) / 10.5 W (Size 3) (* For DC specifications / B type. )
・ Operating temperature range: 5 to 60℃Days to Ship: 15 Day(s) or more -
Electromagnetic Valve for High Vacuum HVB6· 712 Series
CKD
This is an electromagnetic valve for high vacuum and it provides high vacuum maintaining force and excellent durability. Can be used for back pressure.
Days to Ship: 16 Day(s) or more -
High-Vacuum Angle Valve (Multi-Action / Single-Action)
IRIE KOKEN
[Features]
· The vacuum side valve material is completely made up of stainless steel (SUS).
· The entire unit is made small and lightweight by the compact design.
· There is no leakage even when normal pressure and reverse pressure use a pressure difference of 0.15MPa.
· Installation can be in any position. (Unless otherwise specified, it is recommended that installation be with the valve seat facing the direction with largest pressure fluctuation.)
· The functional design results in large conductance.
· It has a single-side rotating flange, so installation is easy (ConFlat flange).Standard Price: 6,393,310 IDR- Days to Ship: 8 Day(s) or more -
Vacuum Assist Valve ZP2V Series
SMC
A vacuum valve which inhibits drops in vacuum pressure, even when no workpiece is present.
[Features]
· Keeps hold of workpieces when multiple vacuum pads are used by a single vacuum generator.
· Protects against drops in vacuum pressure, even when some pads are not suctioning.
· Single-action fitting models now also available.
· No need for switching the operation when changing out workpieces.
· Allows the simplification of control circuits when workpieces have different shapes.
· Fixed orifice size: 0.3 mm, 0.5 mm, 0.7 mm, 1 mm.Days to Ship: 20 Day(s) or more -
SMC
[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)Days to Ship: 15 Day(s) or more -
SMC
Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
[Features]
· Bellows type is particulate-free and cleaned.
· Pressure balanced structure.
· Body material: SCS13 (SUS304 equivalent).
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.Days to Ship: 15 Day(s) or more -
SMC
A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.Days to Ship: 15 Day(s) or more -
Standard Price: 7,215,385 IDR Days to Ship: 12 Day(s)
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| Solenoid Type |
| Switching Type |
| Driving Type |
| Effective Sectional Area(mm2) |
| Pipe Port Type |
| Plumbing Thread Nominal |
| Connecting Tube Diameter |
| Flange Type |
| Flange Nominal |
| CV Value |
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| Brand | CKD | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | CKD | IRIE KOKEN | SMC | SMC | SMC | SMC | NIHON SEIKI |
| Product Series | Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) | Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series | Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series | Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series | Aluminum High Vacuum Angle Valve, XLDV Series, Air-Operated Type With Solenoid Valve | Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series | Stainless Steel High Vacuum Angle Valves / In-Line Valves, XMH/XYH Series (Manual/Bellows Seal) | Normally Closed Type High Vacuum Solenoid Valve XSA Series (XSA1/XSA2/XSA3) | ||||||||||
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| Days to Ship | 16 Day(s) or more | 15 Day(s) or more | 15 Day(s) or more | 15 Day(s) or more | 15 Day(s) or more | 15 Day(s) or more | 15 Day(s) or more | 15 Day(s) or more | 15 Day(s) or more | 15 Day(s) or more | 15 Day(s) or more | 16 Day(s) or more | 8 Day(s) or more | 20 Day(s) or more | 15 Day(s) or more | 15 Day(s) or more | 15 Day(s) or more | 12 Day(s) |
| Type | High Vacuum Solenoid | Air-Actuated Vacuum Valve | Solenoid Valve | Air-Actuated Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve | Pilot Vacuum Valve | High Vacuum Solenoid | Manual Vacuum Valve | Manual Vacuum Valve | High Vacuum Solenoid | High Vacuum Solenoid | Air-Actuated Vacuum Valve | Air-Actuated Vacuum Valve | High Vacuum Solenoid | Pilot Vacuum Valve | Pilot Vacuum Valve | Vacuum Delay Solenoid Valve |
| Application | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use | Single Use |
| Mounting Orientation | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct | Direct |
| Number of Ports | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve | 2-Port Valve |
| Solenoid Type | Single | - | Single | - | - | - | - | Single | - | - | Single | Single | - | - | Single | - | - | Single |
| Switching Type | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Open / 2-Position Normally Closed / Others | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Closed | 2-Position Normally Open |
| Driving Type | Directly Operated | - | Directly Operated | - | - | - | - | Directly Operated | - | - | Directly Operated | Directly Operated | Directly Operated | - | Directly Operated | - | - | Directly Operated |
| Effective Sectional Area(mm2) | - | - | - | - | - | - | - | - | - | - | - | - | - | 0.07 ～ 0.78 | - | - | - | 8.3 |
| Pipe Port Type | NPT / JXR Fittings / Swaged Sleeve Fittings | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Flange | Rc / NPT / Face Seal Fitting / Compression Fitting | Flange | Flange | M / Rc / NPT / One-Touch Plumbing | Flange | Flange | Flange | Rc |
| Plumbing Thread Nominal | 1/8 / 1/4 / 3/8 | - | - | - | - | - | - | - | - | - | 1/8 / 1/4 / 3/8 | - | - | M5 / 1/8 / M6 / M8 | - | - | - | 1/4 |
| Connecting Tube Diameter | - | - | - | - | - | - | - | - | - | - | - | - | - | Ø4 / Ø6 | - | - | - | - |
| Flange Type | - | KF / K | KF | NW / Others | KF / K | KF / K | KF / K | KF / K | KF | KF / CF | - | JIS | NW | - | KF / K | KF / K / CF / Others | KF / K / CF | - |
| Flange Nominal | - | 25 / 40 / 50 / 63 / 80 | 16 / 25 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 | 16 / 25 / 40 / 50 | - | Others / 100 | 16 / 25 / 40 / 50 | - | 16 / 25 / 40 / 50 / 63 / 80 | 16 / 25 / 40 / 50 / 63 / 80 | 25 / 40 / 50 / 63 / 80 | - |
| CV Value | - | - | - | - | - | - | - | - | - | - | - | - | - | 0.0037940379 ～ 0.0422764228 | - | - | - | - |
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- Manual Vacuum Valve
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- Air-Actuated Vacuum Valve
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-
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Effective Sectional Area(mm2)
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