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Rotary Table, Rack and Pinion Type, Clean and Low Dust Generation 11-/20-/22-MSQ Series【1-10 Pieces Per Package】 (Part Numbers)

Rotary Table, Rack and Pinion Type, Clean and Low Dust Generation 11-/20-/22-MSQ Series

[11-Series Clean Series]
・ This product can be used in a clean environment
・ Prevents dust generation in the cleanroom

[20-series Copper-Free/Fluorine-Free Specifications]
・ It can be used in environments where copper and fluorine materials should be avoided
・ External dimensions are the same as standard products

[22-Series, Copper-Free/ Fluorine-Free/ Silicone Type-Free + Low Dust Generation]
・ This product can be used in environments with restrictions on copper-based, fluorine-based, and silicone-based materials
・ The structure is the same as the Clean Series (Grease and packaging are different from the Clean Series)

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images are representative only. Please refer to the manufacturer's catalog for shape details.
  • CAD data is not available for some model numbers.

PDF

Part Number

Configured Part Number is shown.

Part Number
20-MSQB20A-M9BW
20-MSQB20A-M9NL
20-MSQB30A
20-MSQB30A-A93VL
20-MSQB30A-M9BL
20-MSQB30A-M9BW
20-MSQB30A-M9BWVM
20-MSQB30A-M9BWZ
20-MSQB30A-M9BZ
20-MSQB30A-M9N
20-MSQB50A
20-MSQB50A-A93L
20-MSQB50A-M9BL
20-MSQB50A-M9BVL
22-MSQA20A
22-MSQB10R-M9B
22-MSQB20A-A93VL
22-MSQB20A-M9B
22-MSQB20A-M9BL
22-MSQB20A-M9BWL
22-MSQB30A-A90
22-MSQB30A-M9BL
56-PA3210-03
CHD2ELB40B-270-B53
IDF-AB500
IDF-AP604
IDF-AP606
MHSHJ3-32DS-M9BV
MHSHJ3-32DS-M9N
MHSHJ3-40D-M9BL
MHSHJ3-40DA
MHSHJ3-40DA-M9BAL4
MHSHJ3-40DA-M9BVL3
MHSHJ3-40DA-M9BVL4
MHSHJ3-40DAF
MHSHJ3-40DAF-M9BW
MHSHJ3-40DF-M9N
MHSHJ3-40DS-M9B
MHSHJ3-40DS-M9BAZS
MHSHJ3-40DS-M9N
MHSHJ3-40DS-M9NL
MHSHJ3-63D-M9BV
MHSHJ3-63D-M9BVL
MHSHJ3-63DA
MHSHJ3-63DS-M9B
MHSHJ3-80D-M9BLS
MHSHJ3-80DAF
MHSHJ3-80DBF
PA3110-T03
PA3113-F03
PA3113-N03
PA3120-03-X2
PA3210-03
PA3210-03-X2
PA3210-03-X8
PA5110-06-X2
PA5110-F04-N
VHK3-02S-10FL
Part NumberStandard Unit PriceNumber of pc(s). included in pkg.Minimum order quantityVolume DiscountDays to ShipEnvironment, Applications Rigidity, Accuracy Tube Nominal Dia. Allowable Kinetic Energy
(J)
Allowable Kinetic Energy
(J)
Format Size Connection port location Switch Lead wire
(m)
Number of switches Port types Connector type Type

-

1 Piece(s) 15 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9BW0.52 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 15 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9N32 pcs.M5NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 31 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedWithout auto switch (built-in magnet)NoneNoneRc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 31 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedA93V32 pcs.Rc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 31 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9B32 pcs.Rc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 31 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9BW0.52 pcs.Rc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 15 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9BWV12 pcs.Rc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 31 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9BW52 pcs.Rc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 31 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9B52 pcs.Rc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 15 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9N0.52 pcs.Rc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 31 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedWithout auto switch (built-in magnet)NoneNoneRc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 31 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedA9332 pcs.Rc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 31 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedM9B32 pcs.Rc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 31 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported)Standardø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedM9BV32 pcs.Rc 1/8NoneCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 31 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomHigh Rigidity, High Accuracyø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedWithout auto switch (built-in magnet)NoneNoneM5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) 31 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø150.01 to Less Than 0.10.039With shock absorber10Side portedM9B0.52 pcs.M5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) 31 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedA93V32 pcs.M5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) 31 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9B0.52 pcs.M5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) 31 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9B32 pcs.M5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) 31 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9BW32 pcs.M5NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) 31 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedA900.52 pcs.Rc 1/8NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) 15 Day(s) Copper-Based / fluoropolymer-Based Material Not Used (Partially Platting Supported) / CleanroomStandardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9B32 pcs.Rc 1/8NoneCopper-Free/ Fluorine-Free/ Silicone Type-Free + low dust generation (vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedA900.51 pc.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9N0.52 pcs.M5NoneClean Series (Vacuum type)

1,180,530 IDR

10 Pieces Per Package

1 Pack(s) 31 Day(s) CleanroomHigh Rigidity, High Accuracyø150.01 to Less Than 0.10.039With shock absorber10Side portedA9332 pcs.M5NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø150.01 to Less Than 0.10.039With shock absorber10Side portedM9N0.52 pcs.M5NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø150.01 to Less Than 0.10.039With shock absorber10Side portedM9NV32 pcs.M5NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9N0.52 pcs.M5NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9N32 pcs.M5NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedM9B52 pcs.Rc 1/8NoneClean Series (Vacuum type)

12,195,000 IDR

1 Piece(s) 20 Day(s) CleanroomStandardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9BV32 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9N0.51 pc.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedA900.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedM9B32 pcs.Rc 1/8NoneClean Series (Vacuum type)

12,486,150 IDR

1 Piece(s) 20 Day(s) CleanroomStandardø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedM9BV32 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedM9N0.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedA900.52 pcs.M5NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9BV32 pcs.M5NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9BW52 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9N0.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedA9332 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedA900.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedA9332 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9B32 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9BWV0.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9N0.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedA9032 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedA930.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9B0.52 pcs.M5NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedA900.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9N32 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedM9B0.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

13,470,210 IDR

1 Piece(s) 31 Day(s) CleanroomHigh Rigidity, High Accuracyø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedM9N0.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedA9032 pcs.M5NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9BV32 pcs.M5NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedA960.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedA96V0.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

328,050 IDR

1 Piece(s) 31 Day(s) CleanroomHigh Rigidity, High Accuracyø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9B0.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

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Basic Information

Type Rotary Table 2-point Stop Main Body Shape Block Shape Oscillation Angle A 190°
Operation Method Double Rack Valves N/A

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