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Rotary Table, Rack and Pinion Type, Clean and Low Dust Generation 11-/20-/22-MSQ Series【1-10 Pieces Per Package】 (Part Numbers)

Rotary Table, Rack and Pinion Type, Clean and Low Dust Generation 11-/20-/22-MSQ Series

[11-Series Clean Series]
・ This product can be used in a clean environment
・ Prevents dust generation in the cleanroom

[20-series Copper-Free/Fluorine-Free Specifications]
・ It can be used in environments where copper and fluorine materials should be avoided
・ External dimensions are the same as standard products

[22-Series, Copper-Free/ Fluorine-Free/ Silicone Type-Free + Low Dust Generation]
・ This product can be used in environments with restrictions on copper-based, fluorine-based, and silicone-based materials
・ The structure is the same as the Clean Series (Grease and packaging are different from the Clean Series)

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images are representative only. Please refer to the manufacturer's catalog for shape details.
  • CAD data is not available for some model numbers.

PDF

Part Number

Configured Part Number is shown.

Part Number
PA3110-T03
PA3110-T03-N
PA3113-F03
PA3113-N03
PA3120-03-N-X2
PA3120-03-X2
PA3210-03
PA3210-03-X2
PA3210-03-X8
PA3210-T03-N
PA3220-N03
PA5110-06-X2
PA5110-F04-N
PA5110-F06-N
PA5110-T06
PA5210-F04-N
PA5220-04-N
SJ2A60N-5NMOZ-C4
SJ3A60-5NCZ-C4
SJ3160N-5MZF-C6
VEF2121-2-03
VHK2-12F-10FL
VHK2R-06F-06FRC
VHK2R-12F-12FLC
VHK3-02S-10FL
VHK3-04S-10FL
VHK3-10F-08FRL
VHK3R-04S-04SR
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipEnvironment, Applications Rigidity, Accuracy Tube Nominal Dia. Allowable Kinetic Energy
(J)
Allowable Kinetic Energy
(J)
Format Size Connection port location Switch Lead wire
(m)
Number of switches Port types Connector type Type

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9B0.52 pcs.M5NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø180.1 to Less Than 10.116With shock absorber20Side portedA93V0.52 pcs.M5NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedA900.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9N32 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø210.1 to Less Than 10.116With shock absorber30Side portedA900.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedM9B0.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

13,470,210 IDR

1 Piece(s) 31 Day(s) CleanroomHigh Rigidity, High Accuracyø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedM9N0.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedA9032 pcs.M5NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø180.01 to Less Than 0.10.025Includes adjusting bolt20Side portedM9BV32 pcs.M5NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø180.1 to Less Than 10.116With shock absorber20Side portedM9B0.51 pc.M5NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø210.1 to Less Than 10.116With shock absorber30Side portedM9N0.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedA960.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø250.01 to Less Than 0.10.081Includes adjusting bolt50Side portedA96V0.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø250.1 to Less Than 10.294With shock absorber50Side portedA90V32 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø250.1 to Less Than 10.294With shock absorber50Side portedM9N0.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø120.005 to Less Than 0.010.006Includes adjusting bolt7Side portedM9B0.52 pcs.M5NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø6Less than 0.0050.001Includes adjusting bolt1Side portedM9B0.52 pcs.M3NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø180.1 to Less Than 10.116With shock absorber20Side portedM9N0.52 pcs.M5NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomHigh Rigidity, High Accuracyø150.005 to Less Than 0.010.007Includes adjusting bolt10Side portedM9P52 pcs.M5NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø8Less than 0.0050.0015Includes adjusting bolt2Side portedM9B0.52 pcs.M3NoneClean Series (Vacuum type)

-

1 Piece(s) 15 Day(s) CleanroomStandardø180.1 to Less Than 10.116With shock absorber20Side portedM9BWV0.52 pcs.M5NoneClean Series (Vacuum type)

328,050 IDR

1 Piece(s) 31 Day(s) CleanroomHigh Rigidity, High Accuracyø180.1 to Less Than 10.116With shock absorber20Side portedA9332 pcs.M5NoneClean Series (Vacuum type)

331,380 IDR

1 Piece(s) 31 Day(s) CleanroomHigh Rigidity, High Accuracyø180.1 to Less Than 10.116With shock absorber20Side portedM9B32 pcs.M5NoneClean Series (Vacuum type)

440,730 IDR

1 Piece(s) 31 Day(s) CleanroomHigh Rigidity, High Accuracyø180.1 to Less Than 10.116With shock absorber20Side portedM9N0.52 pcs.M5NoneClean Series (Vacuum type)

328,050 IDR

1 Piece(s) 31 Day(s) CleanroomHigh Rigidity, High Accuracyø210.01 to Less Than 0.10.048Includes adjusting bolt30Side portedM9B0.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

345,960 IDR

1 Piece(s) 20 Day(s) CleanroomHigh Rigidity, High Accuracyø210.1 to Less Than 10.116With shock absorber30Side portedM9B0.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

310,230 IDR

1 Piece(s) 31 Day(s) CleanroomHigh Rigidity, High Accuracyø210.1 to Less Than 10.116With shock absorber30Side portedM9B32 pcs.Rc 1/8NoneClean Series (Vacuum type)

509,940 IDR

1 Piece(s) 31 Day(s) CleanroomHigh Rigidity, High Accuracyø210.1 to Less Than 10.116With shock absorber30Side portedM9N0.52 pcs.Rc 1/8NoneClean Series (Vacuum type)

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Basic Information

Type Rotary Table 2-point Stop Main Body Shape Block Shape Oscillation Angle A 190°
Operation Method Double Rack Valves N/A

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