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Vacuum Regulator Clean Series Copper/Fluorine-Free Specifications 10-/20-IRV10/20 Series (Part Numbers)

Vacuum Regulator Clean Series Copper/Fluorine-Free Specifications 10-/20-IRV10/20 Series

[10-Series Clean Series]
・ This product can be used in a clean environment
・ It prevents dust generation in the cleanroom

[20-Series Copper/Fluorine-Free Specifications]
・ It can be used in environments where copper and fluorine materials should be avoided
・ External dimensions are the same as standard products

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images are representative only. Please refer to the manufacturer's catalog for shape details.

PDF

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Part Number

Configured Part Number is shown.

Part Number
SJ3A60K-5CZJD-C4
SJ3360TN-5MOZF-C6
SJ3560N-5MOZ-M5
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipApplicable Fluid
(l/min)
Shape Supply Side, Connecting Tube Diameter Control Side, Connecting Tube Diameter Piping specifications Accessories Monitor output Supply side fitting shape Control side fitting shape Bracket Type

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)Standard___Standard connectionsNo-StraightStraightNoClean series

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1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)Standard___Standard connectionsWith Pressure Gauge-StraightStraightWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)Standard___Standard connectionsWith Pressure Gauge-StraightStraightWith bracketClean series

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  1. 1

Basic Information

Type Vacuum Regulator Control Method Directly Operated Supply Side, Connection Type One-Touch Plumbing
Control Side, Connection Type One-Touch Plumbing Customized specifications No

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