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Vacuum Regulator Clean Series Copper/Fluorine-Free Specifications 10-/20-IRV10/20 Series

Vacuum Regulator Clean Series Copper/Fluorine-Free Specifications 10-/20-IRV10/20 Series

[10-Series Clean Series]
・ This product can be used in a clean environment
・ It prevents dust generation in the cleanroom

[20-Series Copper/Fluorine-Free Specifications]
・ It can be used in environments where copper and fluorine materials should be avoided
・ External dimensions are the same as standard products

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images are representative only. Please refer to the manufacturer's catalog for shape details.

PDF

Japanese Only

Part Number

Configured Part Number is shown.

Part Number
10-IRV10-LC06BGN
10-IRV10-LC06BZA
10-IRV10-LC06BZN
10-IRV10-LC06L
10-IRV10-LC06LZN
10-IRV10-LC08BGN
10-IRV10-LC08G
10-IRV10-LC08ZN
10-IRV10-LN07BG
10-IRV10A-LC06BG
10-IRV10A-LC06BZN
10-IRV10A-LC06BZP
10-IRV10A-LC06LG
10-IRV10A-LC08
10-IRV10A-LC08L
10-IRV20-LC06
10-IRV20-LC06B
10-IRV20-LC06BZA
10-IRV20-LC06BZN
10-IRV20-LC06BZP
10-IRV20-LC06G
10-IRV20-LC06LG
10-IRV20-LC08BZA
10-IRV20-LC10BGN
10-IRV20-LC10BZA
10-IRV20-LC10BZP
10-IRV20-LC10L
10-IRV20-LC10LG
10-IRV20-LC10LZN
10-IRV20-LN11
10-IRV20-LN11BG
10-IRV20A-LC08BG
10-IRV20A-LC08ZA
10-IRV20A-LC10GN
10-PSE540-IM5H
11-MHZ2-25D3-M9NL
11-MHZ2-25DN
11-MHZ2-25DN1
11-MHZ2-25DN1-M9N
11-MHZ2-25DN-F8B
11-MHZ2-25DN-M9B
20-IRV10-LC06B
20-IRV10-LC06BGN
20-IRV10-LC06BZA
20-IRV10-LC06BZN
20-IRV10-LC06GN
20-IRV10-LC08L
20-IRV10-LC08LZN
20-IRV10-LC08ZN
20-IRV20-LC06B
20-IRV20-LC06BGN
20-IRV20-LC10GN
20-IRV20A-LC08
20-IRV20A-LC08ZN
20-IRV20A-LC10
20-IRV20A-LC10ZN
22-MHZ2-10DN1
22-MHZ2-16D
22-MHZ2-16D-M9BL
22-MHZ2-20D-M9BV
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipApplicable Fluid
(l/min)
Shape Supply Side, Connecting Tube Diameter Control Side, Connecting Tube Diameter Piping specifications Accessories Monitor output Supply side fitting shape Control side fitting shape Bracket Type

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1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsGauge nut assembly-ElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith digital pressure switchNPN open collector 2 outputsElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith digital pressure switchNPN open collector 1 outputElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsNo-ElbowElbowWith bottom bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith digital pressure switchNPN open collector 1 outputElbowElbowWith bottom bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsGauge nut assembly-ElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsWith Pressure Gauge-ElbowElbowNoClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsWith digital pressure switchNPN open collector 1 outputElbowElbowNoClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type Elbow_____Standard connectionsWith Pressure Gauge-ElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Single-sided connection specificationWith Pressure Gauge-ElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Single-sided connection specificationWith digital pressure switchNPN open collector 1 outputElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Single-sided connection specificationWith digital pressure switchPNP open collector 1 outputElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Single-sided connection specificationWith Pressure Gauge-ElbowElbowWith bottom bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Single-sided connection specificationNo-ElbowElbowNoClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Single-sided connection specificationNo-ElbowElbowWith bottom bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsNo-ElbowElbowNoClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsNo-ElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith digital pressure switchNPN open collector 2 outputsElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith digital pressure switchNPN open collector 1 outputElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith digital pressure switchPNP open collector 1 outputElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith Pressure Gauge-ElbowElbowNoClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith Pressure Gauge-ElbowElbowWith bottom bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsWith digital pressure switchNPN open collector 2 outputsElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type Elbowø10ø10Standard connectionsGauge nut assembly-ElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type Elbowø10ø10Standard connectionsWith digital pressure switchNPN open collector 2 outputsElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type Elbowø10ø10Standard connectionsWith digital pressure switchPNP open collector 1 outputElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type Elbowø10ø10Standard connectionsNo-ElbowElbowWith bottom bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type Elbowø10ø10Standard connectionsWith Pressure Gauge-ElbowElbowWith bottom bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type Elbowø10ø10Standard connectionsWith digital pressure switchNPN open collector 1 outputElbowElbowWith bottom bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type Elbow______Standard connectionsNo-ElbowElbowNoClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type Elbow______Standard connectionsWith Pressure Gauge-ElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Single-sided connection specificationWith Pressure Gauge-ElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Single-sided connection specificationWith digital pressure switchNPN open collector 2 outputsElbowElbowNoClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type Elbowø10ø10Single-sided connection specificationGauge nut assembly-ElbowElbowNoClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type Elbowø10ø10Standard connectionsWith Pressure Gauge-ElbowElbowWith bracketClean series

7,082,820 IDR

1 Piece(s) 31 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith Pressure Gauge-ElbowElbowNoClean series

5,959,255 IDR

1 Piece(s) 31 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsNo-ElbowElbowNoClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsWith digital pressure switchNPN open collector 1 outputElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type Elbowø10ø10Standard connectionsWith Pressure Gauge-ElbowElbowNoClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsNo-ElbowElbowWith bracketClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type Elbow_____Standard connectionsNo-ElbowElbowNoClean series

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsNo-ElbowElbowWith bracketCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsGauge nut assembly-ElbowElbowWith bracketCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith digital pressure switchNPN open collector 2 outputsElbowElbowWith bracketCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith digital pressure switchNPN open collector 1 outputElbowElbowWith bracketCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsGauge nut assembly-ElbowElbowNoCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsNo-ElbowElbowWith bottom bracketCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsWith digital pressure switchNPN open collector 1 outputElbowElbowWith bottom bracketCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsWith digital pressure switchNPN open collector 1 outputElbowElbowNoCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsNo-ElbowElbowWith bracketCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsGauge nut assembly-ElbowElbowWith bracketCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type Elbowø10ø10Standard connectionsGauge nut assembly-ElbowElbowNoCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Single-sided connection specificationNo-ElbowElbowNoCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Single-sided connection specificationWith digital pressure switchNPN open collector 1 outputElbowElbowNoCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type Elbowø10ø10Single-sided connection specificationNo-ElbowElbowNoCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 15 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type Elbowø10ø10Single-sided connection specificationWith digital pressure switchNPN open collector 1 outputElbowElbowNoCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ8Ø8Standard connectionsNo-ElbowElbowWith bracketCopper and Fluorine Unavailable Specifications

4,623,745 IDR

1 Piece(s) 31 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type Elbowø10ø10Standard connectionsNo-ElbowElbowNoCopper and Fluorine Unavailable Specifications

5,720,235 IDR

1 Piece(s) 20 Day(s) Maximum flow rate 240 L/min (ANR)One-Touch Fitting Type Elbowø10ø10Standard connectionsNo-ElbowElbowWith bottom bracketCopper and Fluorine Unavailable Specifications

-

1 Piece(s) 15 Day(s) Maximum flow rate 140 L/min (ANR)One-Touch Fitting Type ElbowØ6Ø6Standard connectionsWith Pressure Gauge-ElbowElbowWith bottom bracketClean series

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Basic Information

Type Vacuum Regulator Control Method Directly Operated Supply Side, Connection Type One-Touch Plumbing
Control Side, Connection Type One-Touch Plumbing Customized specifications No

Tech Support