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Circulating Fluid Temperature Controller, Refrigeration Thermo-Chiller, Pure Water / Deionized Water (Pure Water) Type, HRZ Series

Circulating Fluid Temperature Controller, Refrigeration Thermo-Chiller, Pure Water / Deionized Water (Pure Water) Type, HRZ Series

[Features]
・ Many achievements in semiconductor process equipment with high temperature stability, wide temperature range, failure diagnosis, external communication, etc.
・ Compliant with various safety standards
・ UL, SEMI standard compliant, CE marking

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images are representative only. Please refer to the manufacturer's catalog for shape details.
  • CAD data is not available for some model numbers.

PDF

Japanese Only

Part Number

Configured Part Number is shown.

Part Number
HRZ001-L2
HRZ001-L2-C
HRZ001-L2-CY
HRZ001-L2-CYZ
HRZ001-L2-D
HRZ001-L2-DY
HRZ001-L2-YZ
HRZ002-L2
HRZ002-L2-CY
HRZ002-L2-CZ
HRZ002-L2-D
HRZ002-L2-DZ
HRZ002-L2-N
HRZ002-L2-YZ
HRZ004-L2-CNZ
HRZ004-L2-CY
HRZ004-L2-CYZ
HRZ004-L2-CZ
HRZ004-L2-D
HRZ004-L2-DY
HRZ004-L2-YZ
HRZ008-L2-C
HRZ008-L2-CY
HRZ008-L2-CYZ
HRZ008-L2-CZ
HRZ008-L2-D
HRZ008-L2-YZ
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipCooling capacity Optional specifications

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1 Piece(s) 15 Day(s) 1 kWNone

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1 Piece(s) 15 Day(s) 1 kWAnalog communication

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1 Piece(s) 15 Day(s) 1 kWAnalog communication, DI control kit

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1 Piece(s) 15 Day(s) 1 kWAnalog communication, DI control kit, automatic circulation fluid collection function

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1 Piece(s) 15 Day(s) 1 kWDevice net communication

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1 Piece(s) 15 Day(s) 1 kWDevice net communication, DI control kit

-

1 Piece(s) 15 Day(s) 1 kWDI control kit, automatic circulation fluid collection function

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1 Piece(s) 15 Day(s) 2 kWNone

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1 Piece(s) 15 Day(s) 2 kWAnalog communication, DI control kit

-

1 Piece(s) 15 Day(s) 2 kWAnalog communication, automatic circulation fluid collection function

-

1 Piece(s) 15 Day(s) 2 kWDevice net communication

-

1 Piece(s) 15 Day(s) 2 kWDevice net communication, automatic circulation fluid collection function

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1 Piece(s) 15 Day(s) 2 kWNPT fitting

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1 Piece(s) 15 Day(s) 2 kWDI control kit, automatic circulation fluid collection function

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1 Piece(s) 15 Day(s) 4 kWAnalog communication, NPT fitting, automatic circulation fluid collection function

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1 Piece(s) 15 Day(s) 4 kWAnalog communication, DI control kit

-

1 Piece(s) 15 Day(s) 4 kWAnalog communication, DI control kit, automatic circulation fluid collection function

-

1 Piece(s) 15 Day(s) 4 kWAnalog communication, automatic circulation fluid collection function

-

1 Piece(s) 15 Day(s) 4 kWDevice net communication

-

1 Piece(s) 15 Day(s) 4 kWDevice net communication, DI control kit

-

1 Piece(s) 15 Day(s) 4 kWDI control kit, automatic circulation fluid collection function

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1 Piece(s) 15 Day(s) 8 kWAnalog communication

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1 Piece(s) 15 Day(s) 8 kWAnalog communication, DI control kit

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1 Piece(s) 15 Day(s) 8 kWAnalog communication, DI control kit, automatic circulation fluid collection function

-

1 Piece(s) 15 Day(s) 8 kWAnalog communication, automatic circulation fluid collection function

-

1 Piece(s) 15 Day(s) 8 kWDevice net communication

-

1 Piece(s) 15 Day(s) 8 kWDI control kit, automatic circulation fluid collection function

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Basic Information

Cooling method Water-cooled refrigeration type Setting Temperature Range 10 to 40℃

Tech Support