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Circulating Fluid Temperature Controller, Water-Cooled Thermo-Chiller, Fluorinated Liquid Type, HRW Series

Circulating Fluid Temperature Controller, Water-Cooled Thermo-Chiller, Fluorinated Liquid Type, HRW Series

Direct heat exchanger with circulating water in the factory.
[Features]
・ For temperature control in a temperature range that does not require a refrigerator
・ Many achievements in semiconductor process equipment with high temperature stability, wide temperature range, failure diagnosis, external communication, etc.
・ UL, SEMI standard compliant, CE marking
・ Inverter type selectable

(i)Caution

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images are representative only. Please refer to the manufacturer's catalog for shape details.

PDF

Japanese Only

Part Number

Configured Part Number is shown.

Part Number
HRW002-H
HRW002-H-C
HRW002-H-CZ
HRW002-H-D
HRW002-HS
HRW002-HS-C
HRW002-HS-CZ
HRW002-HS-D
HRW002-HS-Z
HRW008-H
HRW008-H-CZ
HRW008-H-D
HRW008-H-DNZ
HRW008-HS
HRW008-HS-C
HRW008-HS-CZ
HRW015-H-C
HRW015-H-CD
HRW015-H-CN
HRW015-H-CZ
HRW015-HS-C
HRW015-HS-CZ
HRW015-HS-DZ
HRW030-H-C
HRW030-H-CZ
HRW030-H-DZ
HRW030-HS-C
HRW030-HS-CZ
HRW030-HS-DZ
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipCooling capacity Optional specifications Pump Inverter Control

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1 Piece(s) 15 Day(s) 2 kWNoneNone

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1 Piece(s) 15 Day(s) 2 kWAnalog communicationNone

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1 Piece(s) 15 Day(s) 2 kWAnalog communication, automatic circulation fluid collection functionNone

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1 Piece(s) 15 Day(s) 2 kWDevice net communicationNone

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1 Piece(s) 15 Day(s) 2 kWNoneYes (pump inverter type)

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1 Piece(s) 15 Day(s) 2 kWAnalog communicationYes (pump inverter type)

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1 Piece(s) 15 Day(s) 2 kWAnalog communication, automatic circulation fluid collection functionYes (pump inverter type)

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1 Piece(s) 15 Day(s) 2 kWDevice net communicationYes (pump inverter type)

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1 Piece(s) 15 Day(s) 2 kWCirculating fluid automatic collection functionYes (pump inverter type)

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1 Piece(s) 15 Day(s) 8 kWNoneNone

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1 Piece(s) 15 Day(s) 8 kWAnalog communication, automatic circulation fluid collection functionNone

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1 Piece(s) 15 Day(s) 8 kWDevice net communicationNone

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1 Piece(s) 15 Day(s) 8 kWDevice net communication, NPT fitting, automatic circulation fluid collection functionNone

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1 Piece(s) 15 Day(s) 8 kWNoneYes (pump inverter type)

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1 Piece(s) 15 Day(s) 8 kWAnalog communicationYes (pump inverter type)

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1 Piece(s) 15 Day(s) 8 kWAnalog communication, automatic circulation fluid collection functionYes (pump inverter type)

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1 Piece(s) 15 Day(s) 15 kWAnalog communicationNone

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1 Piece(s) 15 Day(s) 15 kWAnalog communication, device net communicationNone

-

1 Piece(s) 15 Day(s) 15 kWAnalog communication, NPT fittingNone

-

1 Piece(s) 15 Day(s) 15 kWAnalog communication, automatic circulation fluid collection functionNone

-

1 Piece(s) 15 Day(s) 15 kWAnalog communicationYes (pump inverter type)

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1 Piece(s) 15 Day(s) 15 kWAnalog communication, automatic circulation fluid collection functionYes (pump inverter type)

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1 Piece(s) 15 Day(s) 15 kWDevice net communication, automatic circulation fluid collection functionYes (pump inverter type)

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1 Piece(s) 15 Day(s) 30 kWAnalog communicationNone

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1 Piece(s) 15 Day(s) 30 kWAnalog communication, automatic circulation fluid collection functionNone

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1 Piece(s) 15 Day(s) 30 kWDevice net communication, automatic circulation fluid collection functionNone

-

1 Piece(s) 15 Day(s) 30 kWAnalog communicationYes (pump inverter type)

-

1 Piece(s) 15 Day(s) 30 kWAnalog communication, automatic circulation fluid collection functionYes (pump inverter type)

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1 Piece(s) 15 Day(s) 30 kWDevice net communication, automatic circulation fluid collection functionYes (pump inverter type)

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Basic Information

Setting Temperature Range 20 to 90℃

Tech Support