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Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) (XLS-16-5D-Q)

Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) XLS-16-5D-Q

SMC

SMC

A high vacuum angle valve that requires no air to drive, enabling use in portable equipment.
[Features]
· Uses no sliding metal parts, minimizing particulate matter.
· The pressure balance mechanism allows an unrestricted exhaust direction.
· A control power supply circuit for solenoid valve drive is now standard.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

(i)Caution

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Part Number

Configured Part Number is shown.

XLS-16-5D-Q

Aluminum High Vacuum Angle Valve, Electromagnetic Type, Bellows Pressure Balance, XLS Series Specifications

XLS Series (no control power supply) external appearance

XLS Series (no control power supply) external appearance

XLS Series (with control power supply) external appearance

XLS Series (with control power supply) external appearance

ModelXLS-16XLS-25XLS-16-P□GXLS-25-P□G
Valve TypeNormally closed (N.C.)
FluidsInert gas vacuum
Operating Temperature (°C)5 to 40
Operating Pressure Pa (abs)0.1 MPa (G) to 1 × 10-6 (abs)
Conductance L/s Note 1:5858
Amount of leakage Pa·m3/sInternal1.3 × 10 -8, values at normal temperature and excluding gas permeation
External1.3 × 10 -11, values at normal temperature and excluding gas permeation
Flange Type and SizeKF16KF25KF16KF25
Main Material Note 2:Main body: aluminum alloy, Main parts: stainless steel, PFA, FKM (standard sealing material)
Surface TreatmentExternal: hard anodized aluminum, Internal: base material
Control Power Supply Yes/NoNoneYes
Operating Power Supply Voltage24/6, 48/12, 100/24 V DC24 V DC, 100/200 V AC
Allowable Voltage Fluctuation %±10
Electrical EntryG, C, D, T typesG type only
Lead WireAWG20, outer diameter: 2.63 mmVCTF2 × 0.75, outer diameter: 2.3 mm, Sheath outer diameter: 6.6 mm
Coil Insulation TypeClass B
Maximum Operating Frequency (Hz)0.17
Weight (kg)0.40.70.71.0

Note 1: Conductance is the same as that of an elbow with the same dimensions.
Note 2: A coating of vacuum grease (Y-VAC3) has been applied to the valve seat section of the vacuum part.

Product Power/Current (When Applying Rated Voltage)

ModelStartupHolding
Power (W)Current (A)Power (W)Current (A)
XLS-16-□G/C/D/T, P5G361.54.80.38
P1G50 Hz30.50.4714.80.35
60 Hz100.27
P2G50 Hz300.244.90.11
60 Hz2.30.10
XLS-25-□G/C/D/T, P5G472.05.30.5
P1G50 Hz420.62200.46
60 Hz13.50.36
P2G50 Hz450.356.70.15
60 Hz3.00.12

Product Drawing

XLS no control power supply

 

(Unit: mm)

 

Grommet (G) dimensional drawing

Grommet (G) dimensional drawing

Conduit (C) dimensional drawing

Conduit (C) dimensional drawing

Terminal (T) dimensional drawing

Terminal (T) dimensional drawing

DIN terminal (D) dimensional drawing

DIN terminal (D) dimensional drawing

XLS with control power supply

 

(Unit: mm)

 

Grommet (G) dimensional drawing

Grommet (G) dimensional drawing

ModelABCDEFGJKLM
XLS-16-□G401041133830351723--25.5
XLS-16-□C9641--
XLS-16-□D6048-
XLS-16-□T1299562-
XLS-25-□G50128.5138.54840402625.5--28
XLS-25-□C121.543--
XLS-25-□D120.56351-
XLS-25-□T121.5154.59766-
XLS-16-P□G409611338303517238766.5-
XLS-25-P□G50121.5138.54840402625.589.569-

Product Structure/Operation

XLS Series diagram

XLS Series diagram

*Refer to p. 465 of the manufacturer's catalog for maintenance parts.

Working Principle

  • XLS-□-□□ (no control power supply)
    Applying the starting voltage across the coil assembly for approx. 0.15 to 0.2 s opens valve (9). Thereafter, this is held at 25% of the starting voltage. Do not apply the starting voltage for more than 0.3 s as doing so may cause coil burnout. When power to the coil assembly is stopped, valve (9) closes.
  • XLS-□-P□G (with control power supply)
    Applying the rated voltage across the coil assembly opens valve (9). When power to the coil assembly is stopped, valve (9) closes.

*The pressure balance mechanism allows an unrestricted exhaust direction.

Notes

  • *The body material is A6063, the bellows material is SUS316L, the metal materials used for the other vacuum parts are 13Cr stainless steel, SUS304 and A2017 and the sealing material is FKM. The armature assembly part of the vacuum sections uses a fluorinated resin (PFA). A fluorinated grease coating has been applied to the valve in the vacuum section. Check that the fluid in use will not damage the selected material.
  • *When there is no operating power supply, the starting voltage is applied for only 0.15 to 0.2 s. After this, a holding voltage (25% of the starting voltage) should be applied. Failure to do this may cause coil burnout or fire.
  • *Be sure to install a fuse or an earth leakage circuit breaker in the power supply circuit.
  • *Use within the operating pressure range.
  • *Refer to the manufacturer's catalog for parts other than those detailed above.
30
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  1. 1
Part Number
XLS-16-5D-Q
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Nominal Voltage Sonic Speed Conductance Electrical Entry Method CE-marked Control Power Supply Yes/No

-

1 Piece(s) Quote 16DC24V5L/SDIN terminalCE-markedNone

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  1. 1
 

Basic Information

Type Solenoid Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Solenoid Type Single Switching Type 2-Position Normally Closed
Driving Type Directly Operated Pipe Port Type Flange Flange Type KF
Seal Type Bellows Seal

Please check the type/dimensions/specifications of the part XLS-16-5D-Q in the Aluminum High Vacuum Angle Valve XLS Series (Electromagnetic Type, Bellows Pressure Balance) series.

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Specification/Dimensions

  • type

    • XLS
    • XLS-16

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  • Flange Nominal

    • 16
    • 25

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  • Voltage

    • DC24V
    • AC100V
    • AC200V

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  • Sonic Speed Conductance

    • 5L/S
    • 8L/S

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  • Electrical Entry Method

    • Conduit
    • DIN terminal
    • Grommet
    • Terminal

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  • CE-marked

    • CE-marked
    • None

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  • Control Power Supply Yes/No

    • None
    • With control power supply

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  • CAD

    • 2D
    • 3D

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Days to Ship

    • All
    • 15 Day(s) or Less
    • 20 Day(s) or Less
    • 31 Day(s) or Less
    • 49 Day(s) or Less

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Products like this...

Part Number
XLS-16-5C
XLS-16-5D
XLS-16-5G
XLS-16-5G-Q
XLS-16-5T
XLS-16-5T-Q
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Nominal Voltage Sonic Speed Conductance Electrical Entry Method CE-marked Control Power Supply Yes/No

-

1 Piece(s) Quote 16DC24V5L/SConduitNoneNone

-

1 Piece(s) Quote 16DC24V5L/SDIN terminalNoneNone

6,330,230 IDR

1 Piece(s) 20 Day(s) 16DC24V5L/SGrommetNoneNone

-

1 Piece(s) Quote 16DC24V5L/SGrommetCE-markedNone

-

1 Piece(s) Quote 16DC24V5L/STerminalNoneNone

-

1 Piece(s) 15 Day(s) 16DC24V5L/STerminal-None

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