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Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series (XLH-40-XQ1C)

Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series XLH-40-XQ1C

SMC

SMC

A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

(i)Caution

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

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Part Number

Configured Part Number is shown.

XLH-40-XQ1C

Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series Specifications

XLH Series external appearance

XLH Series external appearance

ModelXLH-16XLH-25XLH-40XLH-50
FluidsInert gas vacuum
Operating Temperature (°C)5 to 150
Operating Pressure Pa (abs)1 × 10-6 to atmospheric pressure
Conductance L/s Note 1:5144580
Amount of leakage Pa·m3/sInternalFor standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation
ExternalFor standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation
Flange TypeKF (NW)
Main MaterialMain body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material)
Surface TreatmentExternal: hard anodized aluminum, Internal: base material
Actuation torque N·m0.1 ≤0.15≦0.35≦0.5≦
Handle revolutions571013
Weight (kg)0.230.411.051.62

Note 1: Conductance is the same as that of an elbow with the same dimensions.
Note 2: For valve heater specifications, see "Common Option (1) Heater" in the manufacturer's catalog.

Product Drawing

 

(Unit: mm)

 

XLH Series dimensional drawing

XLH Series dimensional drawing

ModelABCDE Note 1:FGH
XLH-1640100.5381-301735
XLH-255011448112402641
XLH-4065162.566211554157
XLH-5070179.579211755270

Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)
Note 2: A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type. Refer to the manufacturer's catalog for replacement heater part numbers and mounting positions.

Product Diagram

XLH Series diagram

XLH Series diagram

*Refer to the manufacturer's catalog for maintenance parts.

Product Working Principle

The valve opens by rotating the handle to the left. The handle does not move up and down. The indicator shows whether or not the valve is open or closed.
As the the handle turns to the right, the valve begins to close. The valve will be sealed when you no longer feel the turning force. The sealing force for the valve is provided by spring and is constant.

Product Options Descriptions

  • Heater
    Simple heating using thermistors. The valve body can be heated to 100°C or 120°C, but this will differ depending on the valve size. The type and number of thermistors used will vary depending on the size and temperature setting.
  • Indicator
    When the valve is open, an orange mark appears towards the center of the name plate.

Notes

  • *The body material is A6063, the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but other materials can be selected (see section on part number notation). Check that the fluid in use will not damage the selected material.
  • *When using with heaters (thermistors), install a device for preventing overheating.
  • *Use within the operating pressure range.
  • *For gases which cause a large amount of deposits, either heat the valve body or use the type with a heater to prevent deposits in the valve.
  • *Refer to the manufacturer's catalog for parts other than those detailed above.
30
45
60
  1. 1
Part Number
XLH-40-XQ1C
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Nominal Sonic Speed Conductance Seal material Amount of leakage
(Pa·m3/s) 		Body Surface Treatment Seal Change Location Heater Yes/No

-

1 Piece(s) 15 Day(s) 4045L/SKalrez (Compound No.: 4079)Internal: 1.3 × 10^-10 External: 1.3 × 10^-9External: hard anodized aluminum, Internal: base materialExternal sealNone

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  1. 1
 

Basic Information

Type Manual Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Flange Type KF Seal Type Bellows Seal

Please check the type/dimensions/specifications of the part XLH-40-XQ1C in the Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series series.

Configure

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Configure Remaining Specifications
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Specification/Dimensions

  • type

    • XLH
    • XLH-16
    • XLH-25
    • XLH-40
    • XLH-50

    Clear

  • Flange Nominal

    • 16
    • 25
    • 40
    • 50

    Clear

  • Sonic Speed Conductance

    • 5L/S
    • 14L/S
    • 45L/S
    • 80L/S

    Clear

  • Seal material

    • Chemraz SSE38
    • Barrel Perfluoro 70W
    • Chemraz (Compound No.: SS592)
    • Chemraz SS592
    • VMQ 1232-70
    • FKM 1349-80
    • EPDM 2101-80
    • EPDM (Formula No.: 2101-80)
    • Kalrez 4079
    • Kalrez (Compound No.: 4079)
    • ULTIC ARMOR (Compound No.: UA4640)
    • ULTIC ARMOR UA4640

    Clear

  • Amount of leakage(Pa·m3/s)

    • Internal: 1.3 × 10-10, External: 1.3 × 10-11
    • Internal: 1.3 × 10^-10 External: 1.3 × 10^-9
    • Internal: 1.3 × 10-10, External: 1.3 × 10-9
    • Internal: 1.3 × 10^-8 External: 1.3 × 10^-11
    • Internal: 1.3 × 10-8, External: 1.3 × 10-11
    • Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
    • Internal: 1.3 × 10-8, External: 1.3 × 10-9

    Clear

  • Body Surface Treatment

    • External: hard anodized aluminum, Internal: base material
    • External: hard anodized aluminum, internal: anodic oxidation

    Clear

  • Seal Change Location

    • External seal
    • None
    • Valve seal
    • Valve seal / external seal

    Clear

  • Heater Yes/No

    • With heater for 100°C
    • With heater for 120℃
    • None

    Clear

  • CAD

    • 2D
    • 3D

    Clear

Days to Ship

    • All
    • 15 Day(s) or Less
    • 20 Day(s) or Less

    Clear

Specify Alterations

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XLH-16-XAP1A
XLH-16-XAR1A
XLH-16-XAR1B
XLH-40H4
XLH-40H5
XLH-40H5-XQ1A
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Nominal Sonic Speed Conductance Seal material Amount of leakage
(Pa·m3/s) 		Body Surface Treatment Seal Change Location Heater Yes/No

-

1 Piece(s) Quote 165L/SBarrel Perfluoro 70WInternal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, internal: anodic oxidationValve seal / external sealNone

-

1 Piece(s) 15 Day(s) 165L/SChemraz (Compound No.: SS592)Internal: 1.3 × 10^-8 External: 1.3 × 10^-9External: hard anodized aluminum, internal: anodic oxidationValve seal / external sealNone

-

1 Piece(s) 15 Day(s) 165L/SChemraz (Compound No.: SS592)Internal: 1.3 × 10^-8 External: 1.3 × 10^-11External: hard anodized aluminum, internal: anodic oxidationValve sealNone

-

1 Piece(s) Quote 4045L/SFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNoneWith heater for 100°C

-

1 Piece(s) Quote 4045L/SFKM 1349-80Internal: 1.3 × 10-10, External: 1.3 × 10-11External: hard anodized aluminum, Internal: base materialNoneWith heater for 120℃

-

1 Piece(s) Quote 4045L/SKalrez 4079Internal: 1.3 × 10-8, External: 1.3 × 10-9External: hard anodized aluminum, Internal: base materialValve seal / external sealWith heater for 120℃

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