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Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve (XLFV-16G-2M9//-5LZ)

Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve XLFV-16G-2M9//-5LZ

SMC

SMC

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

(i)Caution

  • Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
  • Some of the items are scheduled to be discontinued as of end of March in 2023. The manufacturer keep the items produced but they are not available with Misumi.
    There are not the replacement items and the plan to resumption of sale. Please check the quotation and order screen for details.
  • Refer to the manufacturer's catalog for specification and material details.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Japanese Only

Part Number

Configured Part Number is shown.

XLFV-16G-2M9//-5LZ

Drawing

Drawing of aluminum high vacuum L-shaped valve normally-closed O-ring seal XLFV series air operated type with solenoid valve

Product Specifications

Product Specifications

Part numberXLF (V)-16-2XLF (V)-25-2XLF (V)-40-2XLF (V)-50-2XLF (V)-63-2XLF (V)-80-2
Valve TypeNormally closed (pressurize to open, spring seal)
Operating fluidInert gas vacuum
Operating temperature °C5 to 50
Operating Pressure Pa (abs)1 × 10^-5 to atmospheric pressure
Conductance L/s^*1)5144580160200
Leakage Pa · m^3/sInternalFor standard material (FKM) 1.3 × 10^-10 At room temperature, excluding gas permeation
ExternalFor standard material (FKM) 1.3 × 10^-10 At room temperature, excluding gas permeation
Flange TypeKF (NW)KF (NW)·K (DN)
Main materials^*2)Main body: aluminum alloy main part: stainless steel, FKM (standard sealing material)
Surface TreatmentExternal: hard anodized aluminum, Internal: base material
Pilot pressure MPa (G)0.4 to 0.7
Pilot Port
Connection port diameter		M5: 1 (P) / 3 (R) portsRc1/8: 1 (P) port, M5: 3 (R) ports
Weight (kg)0.340.541.32.03.45.8

Note 1: Conductance is the same as that of an elbow with the same dimensions.
*2) Vacuum grease [Y-VAC2] is applied to the sliding part of the seal of the vacuum part.

Standard table

Standard table of aluminum high vacuum L-shaped valve normally-closed O-ring seal XLFV series air operated type with solenoid valve
30
45
60
  1. 1
Part Number
XLFV-16G-2M9//-5LZ
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Voltage Sonic Speed Conductance Indicator Pilot Port Direction Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s) 		Electrical Entry Method Light/Surge Voltage Suppressor Body Surface Treatment Seal Change Location CE-marked Length of Lead Wire for Switch
(m)

-

1 Piece(s) 15 Day(s) KF16DC24V5L/SWith indicatorFlange surface, backNo auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11L-type plug connectorWith light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible-

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  1. 1
 

Basic Information

Type High Vacuum Solenoid Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Solenoid Type Single Switching Type 2-Position Normally Closed
Driving Type Directly Operated Pipe Port Type Flange Seal Type Elastic Seal

Please check the type/dimensions/specifications of the part XLFV-16G-2M9//-5LZ in the Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLFV Series, Air Operated Type, With Solenoid Valve series.

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Specification/Dimensions

  • Length of Lead Wire for Switch(m)

    • 0.5
    • 3
    • 5

    Clear

  • type

    • XLFV
    • XLFV-16
    • XLFV-25
    • XLFV-40
    • XLFV-50
    • XLFV-63
    • XLFV-80

    Clear

  • Flange Type

    • KF
    • K

    Clear

  • Flange Nominal

    • 16
    • 25
    • 40
    • 50
    • 63
    • 80

    Clear

  • Voltage

    • DC24V
    • AC100V
    • AC220V
    • AC220V

    Clear

  • Sonic Speed Conductance

    • 5L/S
    • 14L/S
    • 45L/S
    • 80L/S
    • 160L/S
    • 200L/S

    Clear

  • Indicator

    • No indicator
    • With indicator

    Clear

  • Pilot Port Direction

    • Flange surface, back
    • Flange surface, left
    • Flange surface, right

    Clear

  • Switch Part Number

    • D-M9B solid-state auto switch
    • D-M9N (solid-state auto switch)
    • M9B
    • M9N
    • M9P
    • A93
    • No auto-switch (no magnet)
    • No auto-switch (with magnet)

    Clear

  • Number of Switches

    • With 1 pc. (Detection position: Valve opening)
    • 2 pcs. valve open/closed
    • With 2 pcs. (Detection position: Valve opening and closing)
    • No auto switch
    • No switch

    Clear

  • Seal material

    • Barrel Perfluoro 70W
    • Barrel Perfluoro (Compound No.: 70 W)
    • FKM 1349-80
    • FKM (Formula No.: 1349-80)
    • EPDM 2101-80

    Clear

  • Amount of leakage(Pa·m3/s)

    • Internal: 1.3 × -10, External: 1.3 × -11
    • Internal: 1.3 × -8, External: 1.3 × -9
    • Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
    • Internal: 1.3 × 10^-10 External: 1.3 × 10^-9
    • Internal: 1.3 × 10^-8 External: 1.3 × 10^-11
    • Internal: 1.3 × 10^-8 External: 1.3 × 10^-9

    Clear

  • Electrical Entry Method

    • Grommet (lead wire length: 300 mm)
    • Grommet (lead wire length: 600 mm)
    • L-type plug connector
    • M-type plug connector

    Clear

  • Light/Surge Voltage Suppressor

    • None
    • With light and surge voltage suppressor
    • With light and surge voltage suppressor (non-polarized type)
    • With surge voltage suppressor

    Clear

  • Body Surface Treatment

    • External: hard anodized aluminum, Internal: base material
    • External: hard anodized aluminum, internal: anodic oxidation

    Clear

  • Seal Change Location

    • Valve seal 1
    • Valve seal 1 / external seal
    • Valve seal 1 / valve seal 2
    • Valve seal 1 / valve seal 2 / external seal
    • External seal
    • None

    Clear

  • CE-marked

    • Not compatible

    Clear

  • CAD

    • 2D
    • 3D

    Clear

Days to Ship

    • All
    • 15 Day(s) or Less
    • 20 Day(s) or Less
    • 26 Day(s) or Less
    • 31 Day(s) or Less

    Clear

Specify Alterations

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XLFV-16G-2M9//-5G-Q
XLFV-16G-2M9//-5GZ
XLFV-16G-2M9//-5WOZ
XLFV-16G-2M9//-5WOZ-Q
XLFV-16G-2M9BA-5GZ
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Voltage Sonic Speed Conductance Indicator Pilot Port Direction Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s) 		Electrical Entry Method Light/Surge Voltage Suppressor Body Surface Treatment Seal Change Location CE-marked Length of Lead Wire for Switch
(m)

-

1 Piece(s) Quote KF16DC24V5L/SWith indicatorFlange surface, backNo auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11Grommet (lead wire length: 300 mm)With light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible-

-

1 Piece(s) 15 Day(s) KF16DC24V5L/SWith indicatorFlange surface, backNo auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11Grommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialNone--

-

1 Piece(s) Quote KF16DC24V5L/SWith indicatorFlange surface, backNo auto-switch (with magnet)No switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -11Grommet (lead wire length: 300 mm)With light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible-

7,326,940 IDR

1 Piece(s) 26 Day(s) or more KF16DC24V5L/SWith indicatorFlange surface, backNo auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11--External: hard anodized aluminum, Internal: base materialNoneNot compatible-

7,450,158 IDR

1 Piece(s) 26 Day(s) or more KF16DC24V5L/SWith indicatorFlange surface, backNo auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11--External: hard anodized aluminum, Internal: base materialNone--

-

1 Piece(s) 15 Day(s) KF16DC24V5L/SWith indicatorFlange surface, backM9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-11Grommet (lead wire length: 300 mm)With light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible0.5

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