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Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series (Part Numbers)

Aluminum High Vacuum Angle Valves, Normally Closed, O-Ring Seal, XLF Series

[Features]
· Aluminum body
· Uniform baking temperature
· Lightweight and compact
· Low outgassing
· Little heavy metal contamination
· Resistant to fluorine corrosion
· Replaceable bellows (bellows-seal type)

(i)Caution

  • Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
  • Some of the items are scheduled to be discontinued as of end of March in 2023. The manufacturer keep the items produced but they are not available with Misumi.
    There are not the replacement items and the plan to resumption of sale. Please check the quotation and order screen for details.

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Japanese Only

■Please refer to the following for the details of the auto switch D-F7NJ.

■Please refer to the following for the details of the auto switch D-M9NJ.

Part Number
XLF-63DA-2M9BA
XLF-63DA-2M9NA
XLF-63DG-2
XLF-63DG-2A93LA
XLF-63DG-2M9BZA
XLF-63DG-2M9BZB
XLF-63DG-2M9BZC
XLF-63DG-2M9NA
XLF-63G-2M9BA-XN1A
XLF-63H0-2
XLF-63MH5-2
XLF-80-2
XLF-80-2-XR3A
XLF-80-2-XT1A
XLF-80-2A93A
XLF-80-2M9BA
XLF-80-2M9BA-XP1A
XLF-80-2M9BB
XLF-80-2M9BC
XLF-80-2M9BZA
XLF-80A-2M9//
XLF-80A-2M9BLA
XLF-80A-2M9NLB
XLF-80D-2
XLF-80D-2A93A
XLF-80D-2M9//
XLF-80D-2M9BLA
XLF-80DF-2
XLF-80DG-2M9BA-XN1A
XLF-80DG-2M9BLA
XLF-80DH0-2
XLF-80DLH0-2
XLF-80G-2
XLF-80G-2M9//
XLF-80G-2M9BA-XN1A
XLF-80G-2M9NB
XLF-80G-2M9NMA
XLF-80GH4-2
XLF-80H0-2
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Indicator Pilot Port Direction Temperature Range
(°C)
Switch Part Number Number of Switches Seal material Amount of leakage
(Pa·m3/s)
Body Surface Treatment Seal Change Location Length of Lead Wire for Switch
(m)
Heater Yes/No

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1 Piece(s) 15 Day(s) K63With indicatorFlange side5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) 15 Day(s) K63With indicatorFlange side5 to 60M9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

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1 Piece(s) Quote K63With indicatorFlange surface, back5 to 60No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) 15 Day(s) K63With indicatorFlange surface, back5 to 60A93With 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) Quote K63With indicatorFlange surface, back5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone5None

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1 Piece(s) Quote K63With indicatorFlange surface, back5 to 60D-M9B solid-state auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone5None

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1 Piece(s) Quote K63With indicatorFlange surface, back5 to 60D-M9B solid-state auto switch1 pc. valve closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone5None

-

1 Piece(s) Quote K63With indicatorFlange surface, back5 to 60D-M9N solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) 15 Day(s) KF63With indicatorFlange surface, back5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)EPDM (Formula No.: 2101-80)Internal: 1.3 × 10^-8 External: 1.3 × 10^-8External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal0.5None

-

1 Piece(s) 15 Day(s) KF63No indicatorFlange side5 to 150No auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) 15 Day(s) KF63No indicatorFlange surface, right5 to 150No auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone-With heater for 120℃

-

1 Piece(s) Quote KF80No indicatorFlange side5 to 60No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) 15 Day(s) KF80No indicatorFlange side5 to 60No auto-switch (no magnet)No auto switchChemraz (Compound No.: SSE38)Internal: 1.3 × 10^-8 External: 1.3 × 10^-8External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal-None

-

1 Piece(s) 15 Day(s) KF80No indicatorFlange side5 to 60No auto-switch (no magnet)No auto switchFKM for Plasma 3310-75Internal: 1.3 × 10^-8 External: 1.3 × 10^-8External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal-None

-

1 Piece(s) Quote KF80No indicatorFlange side5 to 60D-A93 reed auto switch (Flange size 16 not supported)2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) Quote KF80No indicatorFlange side5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) 15 Day(s) KF80No indicatorFlange side5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)Barrel Perfluoro (Compound No.: 70 W)Internal: 1.3 × 10^-8 External: 1.3 × 10^-8External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal0.5None

-

1 Piece(s) 15 Day(s) KF80No indicatorFlange side5 to 60M9BWith 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) 15 Day(s) KF80No indicatorFlange side5 to 60M9BWith 1 pc. (Detection position: Valve closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) 15 Day(s) KF80No indicatorFlange side5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone5None

-

1 Piece(s) 15 Day(s) KF80With indicatorFlange side5 to 60No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) 15 Day(s) KF80With indicatorFlange side5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) 15 Day(s) KF80With indicatorFlange side5 to 60M9NWith 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) 15 Day(s) K80No indicatorFlange side5 to 60No auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) 15 Day(s) K80No indicatorFlange side5 to 60A93With 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) 15 Day(s) K80No indicatorFlange side5 to 60No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) 15 Day(s) K80No indicatorFlange side5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) 15 Day(s) K80With indicatorFlange surface, left5 to 60No auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote K80With indicatorFlange surface, back5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedEPDM 2101-80Internal: 1.3 × -8, External: 1.3 × -8External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal0.5None

-

1 Piece(s) 15 Day(s) K80With indicatorFlange surface, back5 to 60M9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) Quote K80No indicatorFlange side5 to 150No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote K80No indicatorFlange surface, back5 to 150No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote KF80With indicatorFlange surface, back5 to 60No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) 15 Day(s) KF80With indicatorFlange surface, back5 to 60No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote KF80With indicatorFlange surface, back5 to 60D-M9B solid-state auto switch2 pcs. valve open/closedEPDM 2101-80Internal: 1.3 × -8, External: 1.3 × -8External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal0.5None

-

1 Piece(s) Quote KF80With indicatorFlange surface, back5 to 60D-M9N solid-state auto switch1 pc. valve openFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone0.5None

-

1 Piece(s) 15 Day(s) KF80With indicatorFlange surface, back5 to 60M9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone1None

-

1 Piece(s) 15 Day(s) KF80With indicatorFlange surface, back5 to 150No auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)Internal: 1.3 × 10^-10 External: 1.3 × 10^-10External: hard anodized aluminum, Internal: base materialNone-With heater for 100°C

-

1 Piece(s) Quote KF80No indicatorFlange side5 to 150No auto-switch (no magnet)No switchFKM 1349-80Internal: 1.3 × -10, External: 1.3 × -10External: hard anodized aluminum, Internal: base materialNone-None

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Basic Information

Type Pilot Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 2-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Seal Type Elastic Seal

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