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Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series

Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series

A vacuum regulator with little heavy metal contamination.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Low outgassing.

(i)Caution

  • Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
  • Some of the items are scheduled to be discontinued as of end of March in 2023. The manufacturer keep the items produced but they are not available with Misumi.
    There are not the replacement items and the plan to resumption of sale. Please check the quotation and order screen for details.

  • Refer to the manufacturer's catalog for specification and material details.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLAV Series Specifications

XLAV external appearance (side)

XLAV external appearance (side)

ModelXLA(V)-16XLA (V)-25XLA(V)-40XLA(V)-50XLA(V)-63
Valve TypeNormally closed (pressurize to open, spring seal)
FluidsInert gas vacuum
Operating Temperature °CXLAV5 to 50
Operating Pressure Pa (abs)1 × 10-6 to atmospheric pressure
Conductance L/s Note 1:5144580160
Amount of leakage Pa·m3/sInternalFor standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation
ExternalFor standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation
Flange TypeKF (NW)KF (NW) / K (DN)
Main MaterialMain body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material)
Surface TreatmentExternal: hard anodized aluminum, Internal: base material
Pilot Pressure MPa (G)0.4 to 0.7
Pilot Port Connection Port DiameterXLAVM5: 1 (P) / 3 (R) portsRc1/8: 1 (P) port, M5: 3 (R) ports
Weight (kg)XLAV0.290.491.141.642.96

Note 1: Conductance is the same as that of an elbow with the same dimensions.

Structure/Operation

With solenoid valve

With solenoid valve

Valve side exhaust

Valve side exhaust

*Refer to the manufacturer's catalog for maintenance parts.

By applying pressure from the pilot port, the valve linked to the piston overcomes the spring force and actuating force and opens.
XLAV normally applies pilot pressure to the 1 (P) port. The valve opens when the solenoid valve is on and closes when it is off.

Drawing

XLAV dimensional drawing with solenoid valve

XLAV dimensional drawing with solenoid valve

 

(Unit: mm)

 

ModelJKLMN
XLAV-1635.512.310.23.63.6
XLAV-2540.513.810.23.63.6
XLAV-4050.521.610.23.63.6
XLAV-505724.610.23.63.6
XLAV-6378.528.71242
XLAV dimensional drawing

XLAV dimensional drawing

A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type.

 

(Unit: mm)

 

ModelABCDE Note 1:FnFdGH
XLAV-1640103381-30-1740
XLAV-25501134811240-2639
XLAV-40651586621155-4163
XLAV-50701707921175-5268
XLAV-638819610031187957069

Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)

Notes

  • *See the catalog for information on products other than those above.
  • *The product images are representative images only.
Part Number
XLAV-16F-2-5G
XLAV-16F-2-5G-Q
XLAV-16F-2M9NA-1G-XN1A
XLAV-16F-2M9NA-1GZ-XN1A
XLAV-16F-2M9NA-5LZ
XLAV-16G-2-5GS
XLAV-16G-2-5MS
XLAV-16G-2M9NA-1G
XLAV-16G-2M9NA-1G-XAN1A
XLAV-16G-2M9NA-1G-XN1A
XLAV-16G-2M9NA-5G
XLAV-16G-2M9NC-5H
XLAV-16K-2-5H-Q
XLAV-16K-2-5LZ
XLAV-16K-2M9//-5LU
XLAV-16L-2-1G
XLAV-16L-2M9BA-5LZ
XLAV-25F-2-5MS
XLAV-25F-2A93A-5GU
XLAV-25F-2A93A-5LU
XLAV-25F-2M9//-5GU
XLAV-25F-2M9//-5GU-XAN1A
XLAV-25G-2-3G
XLAV-25G-2-5G
XLAV-25G-2-5MS
XLAV-25G-2A93A-5GZ-Q
XLAV-25G-2M9NA-1G
XLAV-25G-2M9NB-4LZ
XLAV-25G-2M9NLA-5M
XLAV-25G-2M9NMC-5LZ
XLAV-25G-2M9PA-2H
XLAV-25J-2-5MS
XLAV-25J-2M9PLB-5LU
XLAV-25K-2-5GS-Q
XLAV-25K-2M9//-5LU
XLAV-25L-2-5LZ
XLAV-25L-2-5LZ-XA
XLAV-40F-2-5MS
XLAV-40G-2-4L
XLAV-40G-2-5HS
XLAV-40G-2-5HZ
XLAV-40G-2-5MS
XLAV-40G-2A93A-5GZ-Q
XLAV-40G-2M9BLA-5GZ
XLAV-40G-2M9NA-1G
XLAV-40G-2M9NA-5LZ
XLAV-40J-2-5MS
XLAV-40K-2M9//-5LU
XLAV-40L-2A90LA-4L
XLAV-50G-2-5G
XLAV-50G-2M9NA-1G
XLAV-50G-2M9NMC-5LZ
XLAV-63DF-2M9PLA-5LU-Q
XLAV-63F-2A93A-5LU
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipFlange Type Flange Nominal Valve Type Indicator Pilot Port Direction Switch Part Number Number of Switches Seal material Rated Voltage Electrical Entry Method Light/Surge Voltage Suppressor Body Surface Treatment Seal Change Location CE-marked Length of Lead Wire for Switch
(m)
Heater Yes/No

-

1 Piece(s) Quote NW16-With indicatorFlange surface, leftNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCGrommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW16-With indicatorFlange surface, leftNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCGrommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneCE-marked--

-

1 Piece(s) Quote NW16-With indicatorFlange surface, leftM9NWith 2 pcs. (Detection position: Valve opening and closing)EPDM (Formula No.: 2101-80)100 V AC 50/60 HzGrommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external sealNot compatible0.5-

-

1 Piece(s) Quote NW16-With indicatorFlange surface, leftM9NWith 2 pcs. (Detection position: Valve opening and closing)EPDM (Formula No.: 2101-80)100 V AC 50/60 HzGrommet (lead wire length: 300 mm)With light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external sealNot compatible0.5-

-

1 Piece(s) Quote NW16-With indicatorFlange surface, leftM9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible0.5-

-

1 Piece(s) Quote NW16-With indicatorFlange surface, backNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCGrommet (lead wire length: 300 mm)With surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW16-With indicatorFlange surface, backNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCM-type plug connectorWith surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW16-With indicatorFlange surface, backM9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)100 V AC 50/60 HzGrommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible0.5-

-

1 Piece(s) Quote NW16-With indicatorFlange surface, backM9NWith 2 pcs. (Detection position: Valve opening and closing)EPDM (Formula No.: 2101-80)100 V AC 50/60 HzGrommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, internal: anodic oxidationValve seal 1 / valve seal 2 / external sealNot compatible0.5-

-

1 Piece(s) Quote NW16-With indicatorFlange surface, backM9NWith 2 pcs. (Detection position: Valve opening and closing)EPDM (Formula No.: 2101-80)100 V AC 50/60 HzGrommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external sealNot compatible0.5-

-

1 Piece(s) Quote NW16-With indicatorFlange surface, backM9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)24 V DCGrommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible0.5-

-

1 Piece(s) Quote NW16-With indicatorFlange surface, backM9NWith 1 pc. (Detection position: Valve closing)FKM (Formula No.: 1349-80)24 V DCGrommet (lead wire length: 600 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible0.5-

-

1 Piece(s) Quote NW16-No indicatorFlange surface, leftNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCGrommet (lead wire length: 600 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneCE-marked--

-

1 Piece(s) Quote NW16-No indicatorFlange surface, leftNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW16-No indicatorFlange surface, leftNo auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW16-No indicatorFlange surface, backNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)100 V AC 50/60 HzGrommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW16-No indicatorFlange surface, backM9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible0.5-

-

1 Piece(s) Quote NW25-With indicatorFlange surface, leftNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCM-type plug connectorWith surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW25-With indicatorFlange surface, leftA93With 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)24 V DCGrommet (lead wire length: 300 mm)With light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, Internal: base materialNoneNot compatible0.5-

-

1 Piece(s) Quote NW25-With indicatorFlange surface, leftA93With 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, Internal: base materialNoneNot compatible0.5-

-

1 Piece(s) Quote NW25-With indicatorFlange surface, leftNo auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCGrommet (lead wire length: 300 mm)With light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW25-With indicatorFlange surface, leftNo auto-switch (with magnet)No auto switchEPDM (Formula No.: 2101-80)24 V DCGrommet (lead wire length: 300 mm)With light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, internal: anodic oxidationValve seal 1 / valve seal 2 / external sealNot compatible--

-

1 Piece(s) Quote NW25-With indicatorFlange surface, backNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)110 V AC, 50/60 HzGrommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW25-With indicatorFlange surface, backNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCGrommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW25-With indicatorFlange surface, backNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCM-type plug connectorWith surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW25-With indicatorFlange surface, backA93With 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)24 V DCGrommet (lead wire length: 300 mm)With light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneCE-marked0.5-

-

1 Piece(s) Quote NW25-With indicatorFlange surface, backM9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)100 V AC 50/60 HzGrommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible0.5-

-

1 Piece(s) Quote NW25-With indicatorFlange surface, backM9NWith 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)220 V AC 50/60 HzL-type plug connectorWith light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible0.5-

-

1 Piece(s) Quote NW25-With indicatorFlange surface, backM9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)24 V DCM-type plug connectorNoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible3-

-

1 Piece(s) Quote NW25-With indicatorFlange surface, backM9NWith 1 pc. (Detection position: Valve closing)FKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible1-

-

1 Piece(s) Quote NW25-With indicatorFlange surface, backM9PWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)200 V AC 50/60HzGrommet (lead wire length: 600 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible0.5-

-

1 Piece(s) Quote NW25-With indicatorFlange surface, rightNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCM-type plug connectorWith surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW25-With indicatorFlange surface, rightM9PWith 1 pc. (Detection position: Valve opening)FKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, Internal: base materialNoneNot compatible3-

-

1 Piece(s) Quote NW25-No indicatorFlange surface, leftNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCGrommet (lead wire length: 300 mm)With surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneCE-marked--

-

1 Piece(s) Quote NW25-No indicatorFlange surface, leftNo auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW25-No indicatorFlange surface, backNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW25-No indicatorFlange surface, backNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressorExternal: hard anodized aluminum, internal: anodic oxidationNoneNot compatible--

-

1 Piece(s) Quote NW40-With indicatorFlange surface, leftNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCM-type plug connectorWith surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW40-With indicatorFlange surface, backNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)220 V AC 50/60 HzL-type plug connectorNoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW40-With indicatorFlange surface, backNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCGrommet (lead wire length: 600 mm)With surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW40-With indicatorFlange surface, backNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCGrommet (lead wire length: 600 mm)With light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW40-With indicatorFlange surface, backNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCM-type plug connectorWith surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW40-With indicatorFlange surface, backA93With 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)24 V DCGrommet (lead wire length: 300 mm)With light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneCE-marked0.5-

-

1 Piece(s) Quote NW40-With indicatorFlange surface, backM9BWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)24 V DCGrommet (lead wire length: 300 mm)With light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible3-

-

1 Piece(s) Quote NW40-With indicatorFlange surface, backM9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)100 V AC 50/60 HzGrommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible0.5-

-

1 Piece(s) Quote NW40-With indicatorFlange surface, backM9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible0.5-

-

1 Piece(s) Quote NW40-With indicatorFlange surface, rightNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCM-type plug connectorWith surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW40-No indicatorFlange surface, leftNo auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW40-No indicatorFlange surface, backA90With 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)220 V AC 50/60 HzL-type plug connectorNoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible3-

-

1 Piece(s) Quote NW50-With indicatorFlange surface, backNo auto-switch (no magnet)No auto switchFKM (Formula No.: 1349-80)24 V DCGrommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible--

-

1 Piece(s) Quote NW50-With indicatorFlange surface, backM9NWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)100 V AC 50/60 HzGrommet (lead wire length: 300 mm)NoneExternal: hard anodized aluminum, Internal: base materialNoneNot compatible0.5-

-

1 Piece(s) Quote NW50-With indicatorFlange surface, backM9NWith 1 pc. (Detection position: Valve closing)FKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressorExternal: hard anodized aluminum, Internal: base materialNoneNot compatible1-

-

1 Piece(s) Quote [Others] DN63-With indicatorFlange surface, leftM9PWith 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, Internal: base materialNoneCE-marked3-

-

1 Piece(s) Quote NW63-With indicatorFlange surface, leftA93With 2 pcs. (Detection position: Valve opening and closing)FKM (Formula No.: 1349-80)24 V DCL-type plug connectorWith light and surge voltage suppressor (non-polarized type)External: hard anodized aluminum, Internal: base materialNoneNot compatible0.5-

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Basic Information

Type High Vacuum Solenoid Application Single Use Mounting Orientation Direct
Number of Ports 3-Port Valve Solenoid Type Single Switching Type 2-Position Normally Closed
Driving Type Air Pilot Pipe Port Type Flange Seal Type Bellows Seal

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