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Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series (XLA-63D-2M9NLA)

Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series XLA-63D-2M9NLA

Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.

(i)Caution

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of October 2018.
  • Some of the items are scheduled to be discontinued as of end of March in 2023. The manufacturer keep the items produced but they are not available with Misumi.
    There are not the replacement items and the plan to resumption of sale. Please check the quotation and order screen for details.

  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

PDF

Part Number

Configured Part Number is shown.

XLA-63D-2M9NLA

Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series Specifications

XLA external appearance (side)

XLA external appearance (side)

ModelXLA-16XLA (V)-25XLA-40XLA-50XLA-63XLA-80
Valve TypeNormally closed (pressurize to open, spring seal)
FluidsInert gas vacuum
Operating Temperature (°C)XLA5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs)1 × 10-6 to atmospheric pressure
Conductance L/s Note 1:5144580160200
Amount of leakage Pa·m3/sInternalFor standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation
ExternalFor standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation
Flange TypeKF (NW)KF (NW) / K (DN)
Main MaterialMain body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material)
Surface TreatmentExternal: hard anodized aluminum, Internal: base material
Pilot Pressure MPa (G)0.4 to 0.7
Pilot Port Connection Port DiameterXLAM5Rc 1/8
Weight (kg)XLA0.250.451.11.62.95.0

Note 1: Conductance is the same as that of an elbow with the same dimensions.

 

Structure/Operation

With solenoid valve

With solenoid valve

Valve side exhaust

Valve side exhaust

By applying pressure from the pilot port, the valve linked to the piston overcomes the spring force and actuating force and opens.
XLAV normally applies pilot pressure to the 1 (P) port. The valve opens when the solenoid valve is on and closes when it is off.

Drawing

XLA air-operated type dimensional drawing

XLA air-operated type dimensional drawing

Note: A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type. Refer to the manufacturer's catalog for more details.

 

(Unit: mm)

 

ModelABCDE Note 1:FnFdGH
XLA-1640103381-30-1740
XLA-25501134811240-2639
XLA-40651586621155-4163
XLA-50701707921175-5268
XLA-638819610031187957069
XLA-80902351173111141108396

Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)

Notes

  • *See the catalog for information on products other than those above.
  • *The product images are representative images only.
Part Number
XLA-63D-2M9NLA
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipSolenoid Type Flange Type Flange Nominal Indicator Pilot Port Direction Temperature Range
(°C)
Switch Part Number Number of Switches Seal material Body Surface Treatment Seal Change Location Length of Lead Wire for Switch
(m)
Heater Yes/No

-

1 Piece(s) Quote Single[Others] DN63No indicatorFlange side5 to 60℃ (no heater)M9N2 pcs. (Detection position: valve open/closed)FKM (Formula No.: 1349-80)External: hard anodized aluminum, Internal: base materialNone3None

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Basic Information

Type Air-Actuated Vacuum Valve Application Single Use Mounting Orientation Direct
Number of Ports 3-Port Valve Switching Type 2-Position Normally Closed Pipe Port Type Flange
Seal Type Bellows Seal

Please check the type/dimensions/specifications of the part XLA-63D-2M9NLA in the Aluminum High Vacuum Angle Valves, Normally Closed, Bellows Seal, XLA Series series.

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Part Number
XLA-16-2-XS1A
XLA-16-2-XT1A
XLA-16-2M9//-XAN1A
XLA-63DA-2A93LB
XLA-63DA-2M9//
XLA-63DA-2M9BA
Part NumberStandard Unit PriceMinimum order quantityVolume DiscountDays to ShipSolenoid Type Flange Type Flange Nominal Indicator Pilot Port Direction Temperature Range
(°C)
Switch Part Number Number of Switches Seal material Body Surface Treatment Seal Change Location Length of Lead Wire for Switch
(m)
Heater Yes/No

-

1 Piece(s) Quote SingleNW16No indicatorFlange side5 to 60℃ (no heater)No auto-switch (no magnet)No auto switchVMQ (Formula No.: 1232-70)External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal-None

-

1 Piece(s) Quote SingleNW16No indicatorFlange side5 to 60℃ (no heater)No auto-switch (no magnet)No auto switchFKM for Plasma (Formula No.: 3310-75)External: hard anodized aluminum, Internal: base materialValve seal 1 / valve seal 2 / external seal-None

-

1 Piece(s) 15 Day(s) -NW16No indicatorFlange side5 to 60No auto-switch (with magnet)No auto switchEPDM (Formula No.: 2101-80)External: hard anodized aluminum, internal: anodic oxidationValve seal 1 / valve seal 2 / external seal-None

-

1 Piece(s) Quote Single[Others] DN63With indicatorFlange side5 to 60℃ (no heater)A931 pc. (Detection position: valve open)FKM (Formula No.: 1349-80)External: hard anodized aluminum, Internal: base materialNone3None

-

1 Piece(s) 15 Day(s) -[Others] DN63With indicatorFlange side5 to 60No auto-switch (with magnet)No auto switchFKM (Formula No.: 1349-80)External: hard anodized aluminum, Internal: base materialNone-None

-

1 Piece(s) Quote Single[Others] DN63With indicatorFlange side5 to 60℃ (no heater)M9B2 pcs. (Detection position: valve open/closed)FKM (Formula No.: 1349-80)External: hard anodized aluminum, Internal: base materialNone0.5None

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