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Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series (Part Numbers)

SMC

A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.

(i)Caution

Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
Refer to the manufacturer's catalog for specification and material details.
The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Part Number

Configured Part Number is shown.

Product Specifications
Part Numbers
Catalog

Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series Specifications

XMA Series external appearance

XYA Series external appearance

Specifications Table

Model		XMA-16	XMA-25 XYA-25	XMA-40 XYA-40	XMA-50 XYA-50	XMA-63 XYA-63	XMA-80 XYA-80
Flange (Valve) Size		16, CF034	25	40, CF070	50	63, CF114	80
Valve Type		Normally closed (pressurize to open, spring seal)
Fluids		Inert gas vacuum
Operating Temperature (°C)		5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs)		1 × 10^-6 to atmospheric pressure
Conductance L/s ^{Note 1:}		5	14	45	80	160	200
Amount of leakage Pa·m³/s	Internal	For standard material (FKM): 1.3 × 10^-10, values at normal temperature and excluding gas permeation
Amount of leakage Pa·m³/s	External	For standard material (FKM): 1.3 × 10^-11, values at normal temperature and excluding gas permeation
Operating Time (s)		0.05	0.1	0.21	0.24	0.26	0.28
Flange Type		KF (NW), CF	KF (NW)	KF (NW), CF	KF (NW)	KF (NW), K (DN), CF	KF (NW), K (DN)
Main Material		Main body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material)
Pilot Pressure MPa (G)		0.4 to 0.7
Pilot Port Connection Port Diameter		M5		Rc 1/8
Weight kg ^{Note 2:}	XMA	0.33 (0.37)	0.61	1.40 (1.76)	2	3.60 (4.96)	6.2
Weight kg ^{Note 2:}	XYA	-	0.66	1.42	2.40	4.30	7.70

Note 1: Conductance is the value for the molecular flow of an elbow with the same dimensions.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.

Diagram

XMA (angle type), XYA (in-line type) diagram

*Refer to the manufacturer's catalog for maintenance parts.

Drawing

(Unit: mm)

XMA (angle type) dimensional drawing 1

XMA (angle type) dimensional drawing 2

Model	A	B	C	D	Fn	Fd	Fc	G	H	P.C.D L1	L2
XMA-16	40	103	38	1	30	-	34	17	40	P.C.D 27	6 × ø4.4 mm
XMA-25	50	113	48	1	40	-	-	26	39	-	-
XMA-40	65	158	66	2	55	-	70	41	63	P.C.D 58.7	6 × ø6.6 mm
XMA-50	70	170	79	2	75	-	-	52	68	-	-
XMA-63	88	196	100	3	87	95	114	70	69	P.C.D 92.1	8 × ø8.4 mm
XMA-80	90	235	117	3	114	100	-	83	96	-	-

(Unit: mm)

XYA (in-line type) dimensional drawing 1

XYA (in-line type) dimensional drawing 2

Model	A	B	C	D	E	Fn	Fd	G	H
XYA-25	100.2	79.5	48	1	23.5	40	-	26	64
XYA-40	130	106	66	2	38	55	-	41	84
XYA-50	178	119	79	2	53	75	-	52	95
XYA-63	209	149	100	3	61	87	95	70	118
XYA-80	268	178	117	3	80	114	110	83	142

Notes

*Refer to the manufacturer's catalog for parts other than those detailed above.
*The product images are representative images only.

: 30; 60; 90

Part Number
XMA-25G-XS1A
XMA-25GH0
XMA-25GH0-XN1A
XMA-25H0
XMA-25H0-XN1A
XMA-25H0-XQ1A
XMA-25J-M9BA
XMA-25J-M9BLA
XMA-25J-M9NA
XMA-25J-M9NC
XMA-25JH0
XMA-25K
XMA-25KH0
XMA-25KH0-XN1A
XMA-25KH0-XQ1A
XMA-25L
XMA-25L-A90LA
XMA-25L-A93C-XN1A
XMA-25L-M9//
XMA-25L-M9NB
XMA-25L-XN1A
XMA-25L-XN1B
XMA-25L-XN1C
XMA-25LH0
XMA-25LH0-XN1A
XMA-25M
XMA-25M-M9NA
XMA-25MH0
XMA-40
XMA-40-A90LA
XMA-40-A93A
XMA-40-A93B
XMA-40-A93LB
XMA-40-A93LC
XMA-40-M9//
XMA-40-M9BA
XMA-40-M9BA-XN1A
XMA-40-M9BB
XMA-40-M9BC
XMA-40-M9BLA
XMA-40-M9BLA-XN1A
XMA-40-M9NA
XMA-40-M9NA-XQ1A
XMA-40-M9NA-XQ1B
XMA-40-M9NB
XMA-40-M9NB-XP1A
XMA-40-M9NB-XP1B
XMA-40-M9NB-XQ1A
XMA-40-M9NB-XR2A
XMA-40-M9NC
XMA-40-M9NLA
XMA-40-M9NLC
XMA-40-M9NMA
XMA-40-M9PA
XMA-40-M9PA-XQ1A
XMA-40-XN1A
XMA-40-XQ1A
XMA-40-XR1A
XMA-40A
XMA-40A-A93LA
XMA-40A-M9//
XMA-40A-M9BA
XMA-40A-M9BLA
XMA-40A-M9NA
XMA-40A-M9NB
XMA-40A-M9NC
XMA-40A-M9NLA
XMA-40A-M9PLA
XMA-40A-XN1A
XMA-40AH0-XN1A
XMA-40AH0-XP1A
XMA-40AH0-XQ1A
XMA-40C
XMA-40C-A90LA
XMA-40C-A93A
XMA-40C-M9//
XMA-40C-M9BA
XMA-40C-M9BC
XMA-40C-M9NA
XMA-40C-M9NB
XMA-40C-M9NC
XMA-40C-M9NLA
XMA-40C-M9NLC
XMA-40C-M9PA
XMA-40CA
XMA-40CA-M9BA
XMA-40CA-M9NA
XMA-40CA-M9NLA
XMA-40CA-XN1A
XMA-40CAH0-XQ1A

Standard Unit Price	Minimum order quantity	Days to Ship	Flange Type	Flange Nominal	Valve Type	Indicator	Pilot Port Direction	Temperature Range (°C)	Switch Part Number	Number of Switches	Seal material	Amount of leakage (Pa·m³/s)	Seal Change Location	Length of Lead Wire for Switch (m)
-	1 Piece(s)	Quote	NW	25	Angle type	With indicator	Flange surface, back	5 to 60	No auto-switch (no built-in magnet)	No auto switch	VMQ (1232-70)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	With indicator	Flange surface, back	5 to 150	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	With indicator	Flange surface, back	5 to 150	No auto-switch (no built-in magnet)	No auto switch	EPDM (2101-80)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
8,066,260 IDR	1 Piece(s)	31 Day(s)	NW	25	Angle type	No indicator	Flange side	5 to 150	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	No indicator	Flange side	5 to 150	No auto-switch (no built-in magnet)	No auto switch	EPDM (2101-80)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	No indicator	Flange side	5 to 150	No auto-switch (no built-in magnet)	No auto switch	Kalrez (4079)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	With indicator	Flange surface, right	5 to 60	D-M9B (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	With indicator	Flange surface, right	5 to 60	D-M9BL (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	With indicator	Flange surface, right	5 to 60	D-M9N (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	With indicator	Flange surface, right	5 to 60	D-M9N (solid-state auto switch)	1 pc. (valve closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	With indicator	Flange surface, right	5 to 150	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	No indicator	Flange surface, left	5 to 60	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	No indicator	Flange surface, left	5 to 150	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	No indicator	Flange surface, left	5 to 150	No auto-switch (no built-in magnet)	No auto switch	EPDM (2101-80)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	No indicator	Flange surface, left	5 to 150	No auto-switch (no built-in magnet)	No auto switch	Kalrez (4079)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	No indicator	Flange surface, back	5 to 60	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	No indicator	Flange surface, back	5 to 60	D-A90L (reed auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	No indicator	Flange surface, back	5 to 60	D-A93 (reed auto switch)	1 pc. (valve closed)	EPDM (2101-80)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	No indicator	Flange surface, back	5 to 60	No auto-switch (with built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	No indicator	Flange surface, back	5 to 60	D-M9N (solid-state auto switch)	1 pc. (valve open)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	No indicator	Flange surface, back	5 to 60	No auto-switch (no built-in magnet)	No auto switch	EPDM (2101-80)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	No indicator	Flange surface, back	5 to 60	No auto-switch (no built-in magnet)	No auto switch	EPDM (2101-80)	1.3 × 10^-8 / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	No indicator	Flange surface, back	5 to 60	No auto-switch (no built-in magnet)	No auto switch	EPDM (2101-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-9 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	No indicator	Flange surface, back	5 to 150	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	No indicator	Flange surface, back	5 to 150	No auto-switch (no built-in magnet)	No auto switch	EPDM (2101-80)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	No indicator	Flange surface, right	5 to 60	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	No indicator	Flange surface, right	5 to 60	D-M9N (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	25	Angle type	No indicator	Flange surface, right	5 to 150	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
12,170,545 IDR	1 Piece(s)	20 Day(s)	NW	40	Angle type	No indicator	Flange side	5 to 60	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-A90L (reed auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-A93 (reed auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-A93 (reed auto switch)	1 pc. (valve open)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-A93L (reed auto switch)	1 pc. (valve open)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-A93L (reed auto switch)	1 pc. (valve closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
12,235,335 IDR	1 Piece(s)	20 Day(s)	NW	40	Angle type	No indicator	Flange side	5 to 60	No auto-switch (with built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
13,019,655 IDR	1 Piece(s)	20 Day(s)	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9B (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9B (solid-state auto switch)	2 pcs. (valve open/closed)	EPDM (2101-80)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9B (solid-state auto switch)	1 pc. (valve open)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9B (solid-state auto switch)	1 pc. (valve closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9BL (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9BL (solid-state auto switch)	2 pcs. (valve open/closed)	EPDM (2101-80)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	2 pcs. (valve open/closed)	Kalrez (4079)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	2 pcs. (valve open/closed)	Kalrez (4079)	1.3 × 10^-8 / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	1 pc. (valve open)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	1 pc. (valve open)	Barrel Perfluoro (70W)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	1 pc. (valve open)	Barrel Perfluoro (70W)	1.3 × 10^-8 / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	1 pc. (valve open)	Kalrez (4079)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	1 pc. (valve open)	Chemraz (SS630)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	1 pc. (valve closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9NL (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9NL (solid-state auto switch)	1 pc. (valve closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9NM (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9P (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	D-M9P (solid-state auto switch)	2 pcs. (valve open/closed)	Kalrez (4079)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	No auto-switch (no built-in magnet)	No auto switch	EPDM (2101-80)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	No auto-switch (no built-in magnet)	No auto switch	Kalrez (4079)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	No indicator	Flange side	5 to 60	No auto-switch (no built-in magnet)	No auto switch	Chemraz (SS592)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	With indicator	Flange side	5 to 60	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	With indicator	Flange side	5 to 60	D-A93L (reed auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	With indicator	Flange side	5 to 60	No auto-switch (with built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	With indicator	Flange side	5 to 60	D-M9B (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	With indicator	Flange side	5 to 60	D-M9BL (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	With indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	With indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	1 pc. (valve open)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	With indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	1 pc. (valve closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	With indicator	Flange side	5 to 60	D-M9NL (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	With indicator	Flange side	5 to 60	D-M9PL (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	With indicator	Flange side	5 to 60	No auto-switch (no built-in magnet)	No auto switch	EPDM (2101-80)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	With indicator	Flange side	5 to 150	No auto-switch (no built-in magnet)	No auto switch	EPDM (2101-80)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	With indicator	Flange side	5 to 150	No auto-switch (no built-in magnet)	No auto switch	Barrel Perfluoro (70W)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	NW	40	Angle type	With indicator	Flange side	5 to 150	No auto-switch (no built-in magnet)	No auto switch	Kalrez (4079)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
13,084,445 IDR	1 Piece(s)	20 Day(s)	[Others] CF	40	Angle type	No indicator	Flange side	5 to 60	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	[Others] CF	40	Angle type	No indicator	Flange side	5 to 60	D-A90L (reed auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	[Others] CF	40	Angle type	No indicator	Flange side	5 to 60	D-A93 (reed auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
13,148,095 IDR	1 Piece(s)	31 Day(s)	[Others] CF	40	Angle type	No indicator	Flange side	5 to 60	No auto-switch (with built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
13,933,555 IDR	1 Piece(s)	31 Day(s)	[Others] CF	40	Angle type	No indicator	Flange side	5 to 60	D-M9B (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	[Others] CF	40	Angle type	No indicator	Flange side	5 to 60	D-M9B (solid-state auto switch)	1 pc. (valve closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	[Others] CF	40	Angle type	No indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	[Others] CF	40	Angle type	No indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	1 pc. (valve open)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	[Others] CF	40	Angle type	No indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	1 pc. (valve closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	[Others] CF	40	Angle type	No indicator	Flange side	5 to 60	D-M9NL (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	[Others] CF	40	Angle type	No indicator	Flange side	5 to 60	D-M9NL (solid-state auto switch)	1 pc. (valve closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	[Others] CF	40	Angle type	No indicator	Flange side	5 to 60	D-M9P (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	[Others] CF	40	Angle type	No indicator	Flange side	5 to 60	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	[Others] CF	40	Angle type	With indicator	Flange side	5 to 60	D-M9B (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	[Others] CF	40	Angle type	With indicator	Flange side	5 to 60	D-M9N (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	[Others] CF	40	Angle type	With indicator	Flange side	5 to 60	D-M9NL (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	[Others] CF	40	Angle type	With indicator	Flange side	5 to 60	No auto-switch (no built-in magnet)	No auto switch	EPDM (2101-80)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-
-	1 Piece(s)	Quote	[Others] CF	40	Angle type	With indicator	Flange side	5 to 150	No auto-switch (no built-in magnet)	No auto switch	Kalrez (4079)	1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}	-	-

Basic Information

Type	Air-Actuated Vacuum Valve	Application	Single Use	Mounting Orientation	Direct
Number of Ports	2-Port Valve	Switching Type	2-Position Normally Closed	Pipe Port Type	Flange
Seal Type	Bellows Seal

Configure

699 Part Numbers

View Part Numbers

Configure Remaining Specifications

Completed

Specification/Dimensions

Flange Type
- NW
- Others
  - CF
  - DN
Clear
Flange Nominal
- 16
- 25
- 40
- 50
- 63
- 80
Clear
Valve Type
- Angle type
- In-line type
Clear
Indicator
- No indicator
- With indicator
Clear
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
Clear
Temperature Range(°C)
- 5 to 60
- 5 to 150
Clear
Switch Part Number
D-M9B (solid-state auto switch)

D-M9BL (solid-state auto switch)

D-M9BM (solid-state auto switch)

D-M9BZ (solid-state auto switch)

D-M9N (solid-state auto switch)

D-M9NL (solid-state auto switch)

D-M9NM (solid-state auto switch)

D-M9NZ (solid-state auto switch)

D-M9P (solid-state auto switch)

D-M9PL (solid-state auto switch)

M9B

M9N

M9P

D-A90 (reed auto switch)

D-A90L (reed auto switch)

A93

D-A93 (reed auto switch)

D-A93L (reed auto switch)

D-A93Z (reed auto switch)

No auto-switch (no built-in magnet)

No auto-switch (with built-in magnet)
Clear
Number of Switches
- 1 pc. (valve closed)
- 1 pc. (valve open)
- With 1 pc. (Detection position: Valve closing)
- With 1 pc. (Detection position: Valve opening)
- 2 pcs. (valve open/closed)
- With 2 pcs. (Detection position: Valve opening and closing)
- No auto switch
Clear
Seal material
Chemraz (Compound No.: SSE38)

Chemraz (SSE38)

Barrel Perfluoro (70W)

Barrel Perfluoro (Compound No.: 70 W)

Chemraz (Compound No.: SS592)

Chemraz (SS592)

Chemraz (SS630)

VMQ (1232-70)

VMQ (Formula No.: 1232-70)

FKM (1349-80)

FKM (Formula No.: 1349-80)

EPDM (2101-80)

EPDM (Formula No.: 2101-80)

FKM for Plasma (3310-75)

Kalrez (4079)

Kalrez (Compound No.: 4079)
Clear
Amount of leakage(Pa·m³/s)
- 1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
- 1.3 × 10^-10 (FKM) / 1.3 × 10^-9 (FKM) (internal/external)
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-9
- 1.3 × 10^-8 / 1.3 × 10^-11 (FKM) (internal/external)
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-11
- 1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
Clear
Seal Change Location
External seal

None

Valve seal

Valve seal / external seal
Clear
Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
Clear
type
- XMA
- XYA
Clear
CAD
- 2D
- 3D
Clear

Days to Ship

All

15 Day(s) or Less

20 Day(s) or Less

31 Day(s) or Less
Clear

Specify Alterations

The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

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Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series (Part Numbers)

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Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series Specifications

Specifications Table

Diagram

Drawing

Notes

Basic Information

Configure

Specification/Dimensions

Flange Type

Flange Nominal

Valve Type

Indicator

Pilot Port Direction

Temperature Range(°C)

Switch Part Number

Number of Switches

Seal material

Amount of leakage(Pa·m³/s)

Seal Change Location

Length of Lead Wire for Switch(m)

type

CAD

Days to Ship

Specify Alterations

Tech Support

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About MISUMITentang MISUMI

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Useful ToolsAlat Serbaguna

Customer ServiceLayanan Pelanggan

MISUMI Contact Monday to Friday (8:30am to 5:30pm) , Saturday (8:30am to 3:00pm) Order cut off time Monday to Friday: 4:30pm , Saturday : 2:00pm MISUMI Kontak Senin - Jumat (8:30 WIB - 17:30 WIB) , Sabtu (8:30WIB - 15:00 WIB) Batas Waktu Pemesanan Senin - Jumat : 16:30 WIB , Sabtu : 14:00 WIB

Search by Category / Brand Pencarian dengan Kategori / Merek

Search by Category Pencarian dengan Kategori

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Message from MISUMI Message from MISUMI

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Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series (Part Numbers)

(i)Caution

Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series Specifications

Specifications Table

Diagram

Drawing

Notes

Basic Information

Configure

Specification/Dimensions

Flange Type

Flange Nominal

Valve Type

Indicator

Pilot Port Direction

Temperature Range(°C)

Switch Part Number

Number of Switches

Seal material

Amount of leakage(Pa·m3/s)

Seal Change Location

Length of Lead Wire for Switch(m)

type

CAD

Days to Ship

Specify Alterations

Tech Support

Payment MethodMetode Pembayaran more Pelajari lebih lanjut

About MISUMITentang MISUMI

About this WebsiteTentang Website ini

Useful ToolsAlat Serbaguna

Customer ServiceLayanan Pelanggan

MISUMI Contact Monday to Friday (8:30am to 5:30pm) , Saturday (8:30am to 3:00pm) *Order cut off time Monday to Friday: 4:30pm , Saturday : 2:00pm MISUMI Kontak Senin - Jumat (8:30 WIB - 17:30 WIB) , Sabtu (8:30WIB - 15:00 WIB) *Batas Waktu Pemesanan Senin - Jumat : 16:30 WIB , Sabtu : 14:00 WIB

Search by Category / Brand Pencarian dengan
Kategori / Merek

Amount of leakage(Pa·m³/s)

MISUMI Contact Monday to Friday (8:30am to 5:30pm) , Saturday (8:30am to 3:00pm) Order cut off time Monday to Friday: 4:30pm , Saturday : 2:00pm MISUMI Kontak Senin - Jumat (8:30 WIB - 17:30 WIB) , Sabtu (8:30WIB - 15:00 WIB) Batas Waktu Pemesanan Senin - Jumat : 16:30 WIB , Sabtu : 14:00 WIB