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Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series (XYA-50-XR3C)

SMC

A vacuum valve with a pressure balanced structure.
[Features]
· Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
· Precision-cast single-piece structure which helps prevent gas accumulation.
· Interchangeable with XL Series aluminum high-vacuum angle valves.
· Bellows type is particulate-free and cleaned.

(i)Caution

Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.
Refer to the manufacturer's catalog for specification and material details.
The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Part Number

Configured Part Number is shown.

XYA-50-XR3C

Product Specifications
Part Numbers
Catalog

Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series Specifications

XMA Series external appearance

XYA Series external appearance

Specifications Table

Model		XMA-16	XMA-25 XYA-25	XMA-40 XYA-40	XMA-50 XYA-50	XMA-63 XYA-63	XMA-80 XYA-80
Flange (Valve) Size		16, CF034	25	40, CF070	50	63, CF114	80
Valve Type		Normally closed (pressurize to open, spring seal)
Fluids		Inert gas vacuum
Operating Temperature (°C)		5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs)		1 × 10^-6 to atmospheric pressure
Conductance L/s ^{Note 1:}		5	14	45	80	160	200
Amount of leakage Pa·m³/s	Internal	For standard material (FKM): 1.3 × 10^-10, values at normal temperature and excluding gas permeation
Amount of leakage Pa·m³/s	External	For standard material (FKM): 1.3 × 10^-11, values at normal temperature and excluding gas permeation
Operating Time (s)		0.05	0.1	0.21	0.24	0.26	0.28
Flange Type		KF (NW), CF	KF (NW)	KF (NW), CF	KF (NW)	KF (NW), K (DN), CF	KF (NW), K (DN)
Main Material		Main body: SCS13 (SUS304 equivalent), Bellows: SUS316L, Major parts: SUS304, FKM (standard sealing material)
Pilot Pressure MPa (G)		0.4 to 0.7
Pilot Port Connection Port Diameter		M5		Rc 1/8
Weight kg ^{Note 2:}	XMA	0.33 (0.37)	0.61	1.40 (1.76)	2	3.60 (4.96)	6.2
Weight kg ^{Note 2:}	XYA	-	0.66	1.42	2.40	4.30	7.70

Note 1: Conductance is the value for the molecular flow of an elbow with the same dimensions.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.

Diagram

XMA (angle type), XYA (in-line type) diagram

*Refer to the manufacturer's catalog for maintenance parts.

Drawing

(Unit: mm)

XMA (angle type) dimensional drawing 1

XMA (angle type) dimensional drawing 2

Model	A	B	C	D	Fn	Fd	Fc	G	H	P.C.D L1	L2
XMA-16	40	103	38	1	30	-	34	17	40	P.C.D 27	6 × ø4.4 mm
XMA-25	50	113	48	1	40	-	-	26	39	-	-
XMA-40	65	158	66	2	55	-	70	41	63	P.C.D 58.7	6 × ø6.6 mm
XMA-50	70	170	79	2	75	-	-	52	68	-	-
XMA-63	88	196	100	3	87	95	114	70	69	P.C.D 92.1	8 × ø8.4 mm
XMA-80	90	235	117	3	114	100	-	83	96	-	-

(Unit: mm)

XYA (in-line type) dimensional drawing 1

XYA (in-line type) dimensional drawing 2

Model	A	B	C	D	E	Fn	Fd	G	H
XYA-25	100.2	79.5	48	1	23.5	40	-	26	64
XYA-40	130	106	66	2	38	55	-	41	84
XYA-50	178	119	79	2	53	75	-	52	95
XYA-63	209	149	100	3	61	87	95	70	118
XYA-80	268	178	117	3	80	114	110	83	142

Notes

*Refer to the manufacturer's catalog for parts other than those detailed above.
*The product images are representative images only.

: 30; 45; 60

Part Number
XYA-50-XR3C

Part Number	Standard Unit Price	Minimum order quantity	Volume Discount	Days to Ship	Flange Type	Flange Nominal	Valve Type	Indicator	Pilot Port Direction	Temperature Range (°C)	Switch Part Number	Number of Switches	Seal material	Amount of leakage (Pa·m³/s)	Seal Change Location	Length of Lead Wire for Switch (m)
	-	1 Piece(s)		15 Day(s)	NW	50	In-line type	No indicator	Flange surface, back	5 to 60	No auto-switch (no built-in magnet)	No auto switch	Chemraz (Compound No.: SSE38)	Internal: 1.3 × 10^-10 External: 1.3 × 10^-9	External seal	-

Basic Information

Type	Air-Actuated Vacuum Valve	Application	Single Use	Mounting Orientation	Direct
Number of Ports	2-Port Valve	Switching Type	2-Position Normally Closed	Pipe Port Type	Flange
Seal Type	Bellows Seal

Please check the type/dimensions/specifications of the part XYA-50-XR3C in the Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series series.

Configure

1 Part Numbers

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Configure Remaining Specifications

Completed

Specification/Dimensions

Length of Lead Wire for Switch(m)
- 0.5
- 1
- 3
- 5
Clear
type
- XMA
- XYA
Clear
Flange Type
- NW
- Others
  - CF
  - DN
Clear
Flange Nominal
- 16
- 25
- 40
- 50
- 63
- 80
Clear
Valve Type
- Angle type
- In-line type
Clear
Indicator
- No indicator
- With indicator
Clear
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, left
- Flange surface, right
Clear
Temperature Range(°C)
- 5 to 60
- 5 to 150
Clear
Switch Part Number
D-M9B (solid-state auto switch)

D-M9BL (solid-state auto switch)

D-M9BM (solid-state auto switch)

D-M9BZ (solid-state auto switch)

D-M9N (solid-state auto switch)

D-M9NL (solid-state auto switch)

D-M9NM (solid-state auto switch)

D-M9NZ (solid-state auto switch)

D-M9P (solid-state auto switch)

D-M9PL (solid-state auto switch)

M9B

M9N

M9P

D-A90 (reed auto switch)

D-A90L (reed auto switch)

A93

D-A93 (reed auto switch)

D-A93L (reed auto switch)

D-A93Z (reed auto switch)

No auto-switch (no built-in magnet)

No auto-switch (with built-in magnet)
Clear
Number of Switches
- 1 pc. (valve closed)
- 1 pc. (valve open)
- With 1 pc. (Detection position: Valve closing)
- With 1 pc. (Detection position: Valve opening)
- 2 pcs. (valve open/closed)
- With 2 pcs. (Detection position: Valve opening and closing)
- No auto switch
Clear
Seal material
Chemraz (Compound No.: SSE38)

Chemraz (SSE38)

Barrel Perfluoro (70W)

Barrel Perfluoro (Compound No.: 70 W)

Chemraz (Compound No.: SS592)

Chemraz (SS592)

Chemraz (SS630)

VMQ (1232-70)

VMQ (Formula No.: 1232-70)

FKM (1349-80)

FKM (Formula No.: 1349-80)

EPDM (2101-80)

EPDM (Formula No.: 2101-80)

FKM for Plasma (3310-75)

Kalrez (4079)

Kalrez (Compound No.: 4079)
Clear
Amount of leakage(Pa·m³/s)
- 1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-11
- 1.3 × 10^-10 (FKM) / 1.3 × 10^-9 (FKM) (internal/external)
- Internal: 1.3 × 10^-10 External: 1.3 × 10^-9
- 1.3 × 10^-8 / 1.3 × 10^-11 (FKM) (internal/external)
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-11
- 1.3 × 10^-8 / 1.3 × 10^{-9 / SUP >(internal/external)}
- Internal: 1.3 × 10^-8 External: 1.3 × 10^-9
Clear
Seal Change Location
External seal

None

Valve seal

Valve seal / external seal
Clear
CAD
- 2D
- 3D
Clear

Days to Ship

All

15 Day(s) or Less

20 Day(s) or Less

31 Day(s) or Less
Clear

Specify Alterations

The specifications and dimensions of some parts may not be fully covered. For exact details, refer to manufacturer catalogs .

Products like this...

Part Number
XMA-16-M9BA
XMA-16-M9BB
XMA-16-M9BC
XYA-50A
XYA-50A-A93B
XYA-50A-A93LA

Standard Unit Price	Minimum order quantity	Days to Ship	Flange Type	Flange Nominal	Valve Type	Indicator	Pilot Port Direction	Temperature Range (°C)	Switch Part Number	Number of Switches	Seal material	Amount of leakage (Pa·m³/s)	Seal Change Location	Length of Lead Wire for Switch (m)
-	1 Piece(s)	Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	D-M9B (solid-state auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	D-M9B (solid-state auto switch)	1 pc. (valve open)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	16	Angle type	No indicator	Flange side	5 to 60	D-M9B (solid-state auto switch)	1 pc. (valve closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	50	In-line type	With indicator	Flange surface, back	5 to 60	No auto-switch (no built-in magnet)	No auto switch	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	50	In-line type	With indicator	Flange surface, back	5 to 60	D-A93 (reed auto switch)	1 pc. (valve open)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-
-	1 Piece(s)	Quote	NW	50	In-line type	With indicator	Flange surface, back	5 to 60	D-A93L (reed auto switch)	2 pcs. (valve open/closed)	FKM (1349-80)	1.3 × 10^-10 (FKM) / 1.3 × 10^-11 (FKM) (internal/external)	-	-

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Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series (XYA-50-XR3C)

(i)Caution

Stainless Steel High-Vacuum Angle Valves / In-Line Valves, Normally Closed, Bellows Seal, XMA/XYA Series Specifications

Specifications Table

Diagram

Drawing

Notes

Basic Information

Configure

Specification/Dimensions

Length of Lead Wire for Switch(m)

type

Flange Type

Flange Nominal

Valve Type

Indicator

Pilot Port Direction

Temperature Range(°C)

Switch Part Number

Number of Switches

Seal material

Amount of leakage(Pa·m3/s)

Seal Change Location

CAD